Additive diffractive optical elements fabrication by PECVP deposition of SiO2 and lift-off process
Hadi Amata,
Qiang Fu,
Wolfgang Heidrich
Abstract:Diffractive optical elements (DOEs) gradually start replacing traditional refractive optics in many applications. The growing interest in DOEs is mainly because of their flexibility in light manipulation with a small form factor and their ability to combine simultaneously optical and computational functions into a single part by applying the software-hardware co-design approach. Two main methods are widely used to fabricate DOEs. The first method is the etched-based method that combines photolithography and re… Show more
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