Add-on process modules - an economic enhancement for high-frequency silicon technology

Burghartz, Joachim N.

doi:10.1109/icmel.2004.1314563

2004 24th International Conference on Microelectronics (IEEE Cat. No.04TH8716)

DOI: 10.1109/icmel.2004.1314563

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Add-on process modules - an economic enhancement for high-frequency silicon technology

Joachim N. Burghartz

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Add-on process modules - an economic enhancement for high-frequency silicon technology

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References 36 publications

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