Adaptive Sliding Mode Controller Design for a Tunable Capacitor Susceptible to Unknown Upper-Bounded Uncertainties and Disturbance

Ranjbar, Ehsan; Yaghoubi, Mostafa; Suratgar, Amir Abolfazl

doi:10.1007/s40998-019-00220-8

Cited by 12 publications

(14 citation statements)

References 43 publications

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“…The nonlinear dynamical model of the considered 3-DOF ROV (6) is in a form of double integrator systems. A wide group of practical systems can be described with this form of the dynamical model, which includes n independent double integrator subsystems, such as the ship course system (Sun and Chen 2016), two-link robotic manipulators (Liu and Zhang 2014), MEMS system (Ranjbar et al 2019) and quadrotor (Modirrousta and Khodabandeh 2015). Hence, by adjusting the proposed control scheme design, the predefined control scheme can be applied to control a huge group of practical systems.…”

Section: Remarkmentioning

confidence: 99%

Chattering-Free Trajectory Tracking Robust Predefined-Time Sliding Mode Control for a Remotely Operated Vehicle

Hosseinabadi

Abadi

Mekhilef

et al. 2020

J Control Autom Electr Syst

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This study investigates a new chattering-free robust predefined-time sliding mode control (CFRPSMC) scheme for the trajectory tracking control problem of a three-degree-of-freedom (3-DOF) remotely operated vehicle (ROV) in the presence of matched uncertainties. The advanced notion of predefined-time stability is used to provide a maximum convergence time as desired that can be set during the control design and independently of the initial conditions. Based on defining a new form of sliding surfaces, a new control law is designed to ease the undesirable chattering phenomenon without damaging the robustness properties and tracking precision. The proposed control scheme can not only solve the predefined-time tracking controller design problem, but also provide the robustness to various uncertainties. The Lyapunov stability theory is used to establish the stability analysis of the closed-loop system in both the reaching phase and the sliding phase. The performance of the proposed CFRPSMC scheme is evaluated for the 3-DOF ROV through two comparative simulation cases using Simulink/MATLAB. The comparative simulation results and analytical comparisons demonstrate the efficacy and superiority of the proposed method compared with other relevant conventional methods.

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Section: Remarkmentioning

confidence: 99%

Chattering-Free Trajectory Tracking Robust Predefined-Time Sliding Mode Control for a Remotely Operated Vehicle

Hosseinabadi

Abadi

Mekhilef

et al. 2020

J Control Autom Electr Syst

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show abstract

“…where A r n×n , X r n×1 = x rẋr T , B r n×m , [r(t)] m×1 are jointly reference model system matrix, desired trajectory vector, input matrix, and reference input. Equations (25) and (26) represent the mathematical characterization of the matched and unmatched disturbance and uncertainty;…”

Section: Design Of the Controller And It Mathematicsmentioning

confidence: 99%

“…Esteeming Eqs. (23), (25) and (26), the plate dynamics will be streamlined in the subsequent manner (21)…”

Section: Design Of the Controller And It Mathematicsmentioning

confidence: 99%

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Design of an adaptive sliding mode controller with a sliding mode Luenberger observer for the MEMS capacitive plates

Ranjbar

Suratgar

2020

SN Appl. Sci.

Self Cite

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Uncertain parameters in a MEMS tunable capacitor, as one of the fundamental elements in a MEMS AC voltage reference source (VRS) structure, is an important issue for acquisition of a rigorous voltage in the VRS output. The output is mostly supposed to be destroyed by harmful disturbance and noise. Even though the manufacturers make attempts to build MEMS tunable capacitor with desired characteristics in thorough compliance with the initial major design, uncertainties in the parameters inescapably do exist in manufacturing process on the ground of deficiencies in various procedures. This paper mainly remarks an adaptive sliding mode controlling design with a sliding mode Luenberger observer and its application for a MEMS tunable capacitor. The control design is done considering matched and unmatched terms of uncertainties and disturbance. The advantageous outcome is that the VRS could be generating a stable precise regulated output voltage owing to correct distance adjustment of the capacitor charged plates. The design exploits the sliding mode observer to get rid of extra usage of plate position measurement in the control structure. The controller alleviates the system output of the matched and unmatched disturbance which could exist dynamically because of cross stiffness and damping in addition to other inertial and electrostatic disturbing forces. The matched uncertainties, such as stiffness and damping change, might appear due to variation in fabrication procedures or working condition. The simulation yields are satisfactory and depict a persuasive tracking performance as well as regulation about the pull-in point.

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“…Sliding mode control theory [3] and [4], is a control strategy that allows the system to produce two or more subsystems and by switching certain conditions, through discrete control input to achieve the goal of control. The superb characteristics of this strategy include robustness towards matching parameter uncertainty as well as external perturbations [5], [6], [7], [8]. SMO not only does it contain the benefits above, it also contains the benefits of the sliding mode control theory.…”

Section: Introductionmentioning

confidence: 99%

Sliding Mode Observer Based Multi-Layer Metal Plates Core Temperature On-Line Estimation for Semiconductor Intelligence Manufacturing

Tsai

Peng

2020

IEEE Access

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This paper focuses on the technological development of core temperature estimation algorithm of multi-layer metal plates. It applies new control technology in the field of real time monitoring of semiconductor producing processes. To achieve real time core temperature estimation in semiconductor equipment processes, this paper will follow the order of: system description, model derivation, parameter identification, and design of a robust core temperature observer of multi-layer metal plates, which will then be cross validated with experimental data. In the metal heating system model proposed in this paper, external cooling is considered as an unknown interference. Since the system contains an unknown interference, the sliding mode observer (SMO) will use the equivalent conversion technique to tackle with the uncertainty. In order to improve the degree of freedom and flexibility in the design of the gain matrix, and considering the effects of parameter identification uncertainty, this paper introduces the multi-objective linear matrix inequality (LMI) in the design of the sliding mode observer to suppress the impacts of the non-matching uncertainty on the system and to reduce the gain matrix which also satisfies the convergence requirement of the designer. In terms of algorithm implementation, the parameters of the thermally processed multilayer plate model are first identified through the minimum difference filter (MDF), the data is then filtered offline, and lastly, the model parameter is derived using the least square (LS) method. The filtering technology can greatly improve the accuracy of parameter identification and improve the SMO estimation precision. Finally, the experimental data of the actual semiconductor machine and the estimation from the proposed method verifies the usefulness of the SMO in core temperature estimation of multi-layer metal plate heating systems.

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Adaptive Sliding Mode Controller Design for a Tunable Capacitor Susceptible to Unknown Upper-Bounded Uncertainties and Disturbance

Cited by 12 publications

References 43 publications

Chattering-Free Trajectory Tracking Robust Predefined-Time Sliding Mode Control for a Remotely Operated Vehicle

Chattering-Free Trajectory Tracking Robust Predefined-Time Sliding Mode Control for a Remotely Operated Vehicle

Design of an adaptive sliding mode controller with a sliding mode Luenberger observer for the MEMS capacitive plates

Sliding Mode Observer Based Multi-Layer Metal Plates Core Temperature On-Line Estimation for Semiconductor Intelligence Manufacturing

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