Adaptive feed-forward controller of piezoelectric actuator for micro/nano-positioning

Abstract

In this paper, design and implementation of an adaptive feed-forward controller for micro/nanopositioning control of piezoelectric actuator (PEA) is described. Discrete-time Dahl hysteresis-based mathematical model of the PEA is developed and the values of the model parameters are estimated through an autoregressive with exogenous terms (ARX) model identification technique using experimental input-output data. A recursive least-square estimator (RLSE)-based adaptive feed-forward (FF) controller is proposed, which takes into account the parameter uncertainty. The FF controller has also been implemented in a DsPIC30F4011 microcontroller. The established PEA model and the controller are validated by simulation and experimental results including parameter variation.