Adaptive Control of Magnetic Drive Actuator for Laser Cutting

Abstract

This paper describes an adaptive control method for a magnetic drive actuator that used for the laser cutting to realize high speed and high accuracy machining. Firstly, a zero bias current method and a nonlinear compensator are examined and used for the actuator. Secondly, an adative control method is presented. Finally, the coefficient of the gap-current-force is estimated and the effectiveness of the presented control method is verified by experiments. The experimental results show that the coefficient of the gap-current-force reduces exponentially depending on the increase in the length of the air gap. By using the adaptive control, the peak-to-peak vibration amplitude of the lens holder is reduced from 1.95um to 1.55um.