Adaptive Backstepping Time Delay Control for Precision Positioning Stage with Unknown Hysteresis
Zhifu Li,
Jiawei Li,
Tao Weng
et al.
Abstract:Piezoelectric-actuated precision positioning stages are widely used in high-precision instruments and high-end equipment due to their advantages of high resolution, fast response, and compact size. However, due to the strong nonlinearity of hysteresis, the presence of hysteresis in piezoelectric actuators seriously affects the positioning accuracy of the system. In addition, it is challenging to identify the model parameters for hysteresis. In this paper, an adaptive backstepping time delay control method is p… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.