2020
DOI: 10.1088/1361-6463/abc77c
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Active tunable THz metamaterial array implemented in CMOS technology

Abstract: Terahertz (THz) metamaterial modulators offer multifaceted capabilities for various practical applications such as THz imaging, wireless communications, sensing, et cetera. However, compared to the modulation devices for other electromagnetic bands, the ubiquitous proliferation of THz applications is severely impeded by the tremendous lack of complementary metal-oxide-semiconductor (CMOS) compatible technology. Here we demonstrate a CMOS based actively tunable THz metamaterial array (C-ATTMA) with split ring r… Show more

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Cited by 16 publications
(4 citation statements)
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References 63 publications
(99 reference statements)
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“…By utilizing custom-designed CMOS-based semiconductor structures, it is possible to circumvent the cutoff frequency limitation of commercial transistors (Figure 2e) [53]. The meta-atom structure, consisting of a square SRR on top of a six-layer CMOS-based semiconductor structure, is shown in Figure 2f.…”
Section: Complementary Metal-oxide-semiconductor (Cmos) Transistormentioning
confidence: 99%
“…By utilizing custom-designed CMOS-based semiconductor structures, it is possible to circumvent the cutoff frequency limitation of commercial transistors (Figure 2e) [53]. The meta-atom structure, consisting of a square SRR on top of a six-layer CMOS-based semiconductor structure, is shown in Figure 2f.…”
Section: Complementary Metal-oxide-semiconductor (Cmos) Transistormentioning
confidence: 99%
“…[1][2][3][4][5] The increasing demand for broadband on-chip multifunctional devices has emphasized CMOS technology for THz photonic integrated circuits (TPICs), as it supports large-scale collaborative device clusters. [6][7][8][9] An integrated photonic platform requires various advanced signal processing stages, among which narrowband filtering is critical in preserving signals of interest. At microwave frequencies, photonic circuits provide enhanced filtering functionalities to overcome the low-range frequency tunability of electronic filters.…”
Section: Introductionmentioning
confidence: 99%
“…These active materials can be incorporated into the metamaterial as the substrate, surrounding media, part of the resonator or as an entire resonator itself. Various material systems have been explored for THz metadevices, including conventional semiconductors [22][23][24][25][26][27][28][29][30][31][32][33][34][35][36][37], phase change materials [38][39][40][41], phase transition materials [42][43][44][45][46][47][48], liquid crystals [49][50][51][52][53], 2D materials [54][55][56][57][58][59][60][61][62][63][64][65], 3D semimetals [66], topological insulators [67], perovskites [68]…”
Section: Introduction To Terahertz Metadevicesmentioning
confidence: 99%