Active stripe waveguides produced by electron beam lithography in LiF single crystals

Montereali, Rosa Maria; Mancini, Antonella; Righini, Giancarlo C.; Pelli, S.

doi:10.1016/s0030-4018(98)00299-5

Cited by 72 publications

(27 citation statements)

References 8 publications

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“…We notice that, as a consequence of the influence of EBL on the material conjugation length and cross-linking, also refractive index changes below our experimental error ͑i.e., in the range of 10 −4 -10 −2 ͒ are likely and can affect waveguiding in the exposed polymer, as previously observed in lithium fluoride crystals. 28,29 This approach allows one to overcome problems related to resist development. For instance, the profile of developed line features very often becomes trapezoidal 25 because of the lack of a sharp threshold in the solubility contrast between irradiated and nonirradiated polymer regions.…”

Section: Silvia Tavazzimentioning

confidence: 99%

Organic-based distributed feedback lasers by direct electron-beam lithography on conjugated polymers

Camposeo

Persano

Tavazzi

et al. 2007

Applied Physics Letters

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Section: Silvia Tavazzimentioning

confidence: 99%

Organic-based distributed feedback lasers by direct electron-beam lithography on conjugated polymers

Camposeo

Persano

Tavazzi

et al. 2007

Applied Physics Letters

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“…6 Little attention, however, has so far been devoted to AH films and to their application in the development of innovative miniaturized coherent light sources, like active waveguides and microcavities. Broad band single-mode active channel waveguides have been realized for the first time at the surface of LiF single-crystals 7 and films 8 thermally evaporated on LiF bulk. The directwriting lithographic process, which simultaneously induces the waveguiding structure and the photoluminescent CCs, looks like a promising method for designing a waveguiding structure on LiF.…”

Section: Integrated Opticsmentioning

confidence: 99%

Micro and sub‐micro fabrication techniques for optically confined structures based on lithium fluoride

Montereali

Mancini

Martelli

et al. 2001

Applied Organom Chemis

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Lithium fluoride (LiF) films treated by lowenergy electrons represent a very promising candidate for the realization of miniaturized broad band optical devices like active waveguides and microcavities. The main properties, in particular the refractive index, density, structure and microstructure, of polycrystalline LiF films grown by thermal evaporation on amorphous and crystalline substrates are discussed, together with their influence on colour centres formation induced by low-energy electron beam bombardment and on the choice of the main irradiation conditions.

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“…[14][15][16] More sophisticated passive, active and nonlinear functions that embedded in bulk dielectrics have also been realized, such as power splitters, 17 waveguide lasers 18 and directional couplers 19 . Compared with ion exchange, 20 ion implantation 21 and other lithography approach, 22 femtosecond laser inscription of photonic circuit manifests itself in single-step and 3-D processing superiority with generated waveguides contained inside hosts thus tolerant to changing environmental conditions. So far, femtosecond laser based fabrication of waveguide basically relies on two types of laser-induced refractive index change.…”

Section: Introductionmentioning

confidence: 99%

Stress-induced waveguides written by femtosecond laser in phosphate glass

Dong

Zhao

2013

SPIE Proceedings

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A 10-mm-long cylindrical shell was written in neodymium doped phosphate glass by a femtosecond laser delivering pulses with a pulse repetition of 1 kHz, energies of 90 uJ and duration of 120 fs. The pulses were focused below the glass surface by an objective producing ablation filaments about 200 um in length. During processing, the sample was placed on a three-dimensional (3-D) translation stage, which moved along an enclosed pattern in the horizontal plane followed by a minor descent less than the filament length in the vertical direction. As this procedure continued, a cylinder, which demonstrated optical waveguiding, was fabricated with a rarified periphery and densified center region due to plasmonic expansion and outward shockwave upon laser ablation. The refractive-index contrast, propagation loss, near-and farfield mode distribution, and microscopic fluorescence micrograph of the waveguides were measured. 1-to-N splitters with adjustable splitting ratio were also fabricated using current approach indicating its 3-D processing flexibility. Compared with previous femtosecond laser fabrication methods, waveguides prepared in this approach exploit both depressed cladding and stress-induced refractive index increase in core region and show controllable mode conduction, strong field confinement, large numerical aperture, low propagation loss, acceptable thermal stability and intact core region.

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Active stripe waveguides produced by electron beam lithography in LiF single crystals

Cited by 72 publications

References 8 publications

Organic-based distributed feedback lasers by direct electron-beam lithography on conjugated polymers

Organic-based distributed feedback lasers by direct electron-beam lithography on conjugated polymers

Micro and sub‐micro fabrication techniques for optically confined structures based on lithium fluoride

Stress-induced waveguides written by femtosecond laser in phosphate glass

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