Active species characterization in RF remote oxygen plasma using actinometry OES and electrical probes

Saloum, S.; Naddaf, M.; Alkhaled, B.

doi:10.1016/j.vacuum.2010.08.007

Cited by 22 publications

(20 citation statements)

References 31 publications

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“…For different purposes in terms of treatment of solid materials by reactive oxygen atoms different densities are needed and therefore it is very useful to know the density of atoms in plasmas as precisely as possible. Methods for oxygen atom density measurement include NO titration [ 15 – 17 ], optical absorption spectroscopy [ 18 – 20 ], actinometry [ 21 – 23 ] and catalytic probes [ 11 – 14 ].…”

Section: Introductionmentioning

confidence: 99%

A Fiber Optic Catalytic Sensor for Neutral Atom Measurements in Oxygen Plasma

Zaplotnik

Vesel

Mozetič

2012

Sensors

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The presented sensor for neutral oxygen atom measurement in oxygen plasma is a catalytic probe which uses fiber optics and infrared detection system to measure the gray body radiation of the catalyst. The density of neutral atoms can be determined from the temperature curve of the probe, because the catalyst is heated predominantly by the dissipation of energy caused by the heterogeneous surface recombination of neutral atoms. The advantages of this sensor are that it is simple, reliable, easy to use, noninvasive, quantitative and can be used in plasma discharge regions. By using different catalyst materials the sensor can also be applied for detection of neutral atoms in other plasmas. Sensor design, operation, example measurements and new measurement procedure for systematic characterization are presented.

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Section: Introductionmentioning

confidence: 99%

A Fiber Optic Catalytic Sensor for Neutral Atom Measurements in Oxygen Plasma

Zaplotnik

Vesel

Mozetič

2012

Sensors

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“…The Ar (671.8 nm), Ar (723 nm) and other typical emission lines are shown out. Since the discharge is in atmospheric pressure, OH (309 nm) [20], N 2 (337.1, 357.7, 371.1 nm) [21] and O (777.1 nm) [22] are also shown out in the plasma. the plasma treatment.…”

Section: I-v Curve and Oes Test Of The Dischargementioning

confidence: 99%

The Effects of Thermal and Atmospheric Pressure Radio Frequency Plasma Annealing in the Crystallization of TiO2 Thin Films

Zhang

et al. 2019

Coatings

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Amorphous TiO2 thin films were respectively annealed by 13.56 MHz radio frequency (RF) atmospheric pressure plasma at discharge powers of 40, 60, 80 W and thermal treatment at its corresponding substrate temperature (Ts). Ts was estimated through three measurement methods (thermocouple, Newton’s law of cooling and OH optical emission spectra simulation) and showed identically close results of 196, 264 and 322 °C, respectively. Comparing with thermal annealing, this RF atmospheric pressure plasma annealing process has obvious effects in improving crystallization of the amorphous films, based on the XRD and Raman analysis of the film. Amorphous TiO2 film can be changed to anatase film at about 264 °C of Ts for 30 min plasma treatment, while it almost remains amorphous after 322 °C thermal treatment for the same time.

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“…With aid of quantitative plasma diagnosis in Saloum, Naddaf, and Alkhaled (2010) and Suenaga, Yunata, and Aizawa (2013), the activated plasma state is described to understand the reactivity between the oxygen plasmas and the DLC coating. Through the spectroscopic analysis of emissive light from oxygen plasmas, the state of activated species is analyzed to optimize the plasma processing parameters.…”

Section: Plasma Assisted Oxidation Of Dlc Coatingmentioning

confidence: 99%

Recycling of DLC-Coated Tools for Dry Machining of Aluminum Alloys via Oxygen Plasma Ashing

Aizawa¹,

Masaki²,

Morimoto³

et al. 2014

MER

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DLC coated tools have been widely utilized in the dry milling and cutting of aluminum alloy parts and components for automotive industries and cellular phone makers. Most of these tools are inevitably exchanged with new ones to preserve high quality of machined products. Then, the used DLC coating must be removed or ashed away before grinding and polishing. Complete removal of used DLC coating plays a key to make DLC-recoating onto the ashed surface of tools for their reuse. High density oxygen plasma ashing provides a solution to make perfect ashing of DLC coating together with metallic interlayers before recoating. In the present paper, this plasma system with quantitative diagnosis instrumentation is first stated to describe the effect of processing conditions on the ashing behavior. Two types of end-milling tools were prepared to prove that the whole DLC-coating should be completely removed with fast rate. This ashed tool substrate was ground and DLC-recoated to demonstrate that the reused tools have the same machinability in dry as the original virgin tools through dry milling experiments.

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Active species characterization in RF remote oxygen plasma using actinometry OES and electrical probes

Cited by 22 publications

References 31 publications

A Fiber Optic Catalytic Sensor for Neutral Atom Measurements in Oxygen Plasma

A Fiber Optic Catalytic Sensor for Neutral Atom Measurements in Oxygen Plasma

The Effects of Thermal and Atmospheric Pressure Radio Frequency Plasma Annealing in the Crystallization of TiO2 Thin Films

Recycling of DLC-Coated Tools for Dry Machining of Aluminum Alloys via Oxygen Plasma Ashing

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