Activation and Decomposition of N₂ on Heated Tungsten Filament Surfaces

Abstract

for useful discussions and Professor Tomoki Nakayama of Nagoya University for his technical advice to generate VUV radiation at 120.1 nm.

Estimation of activation energies for decomposition reaction of polymer by hydrogen radicals generated using hot-wire catalyzer

“…This is because the generation efficiency of the nitrogen atom by a hot-wire catalyzer is much lower than that of the hydrogen radicals. Umemoto et al found that the hydrogen radical concentration reaches 10 14 cm −3 [16] at a catalyzer temperature of 1900°C and H 2 pressure of 5.6 Pa; however, the nitrogen atom concentration is only 10 11 cm −3 [17,18] even at a catalyzer temperature of 2500°C and N 2 pressure of 100 Pa. In addition, it is considered that nitrogen radicals did not generate by collision of hydrogen radical to nitrogen molecule.…”

“…The polymercoated Si substrate was attached just below the catalyzer. The distance Thin Solid Films 575 (2015) [17][18][19][20] between the catalyzer and the substrate was fixed at 100 mm. The catalyzer was heated at 2400°C (current = 30 A) using a direct current supply.…”

Gas-phase diagnoses in catalytic chemical vapor deposition (hot-wire CVD) processes

“…The efficiency of producing H atoms from H 2 in catalytic decomposition is higher than in typical glow plasma processes [4], and this high efficiency leads to the efficient production of CH 3 and SiH 3 in the gas phase. On the other hand, the production efficiencies of O and N atoms are low compared to plasma processes [32][33][34][35][36]. It should be stressed, however, that only ground-state atoms are produced in the catalytic decomposition of O 2 and N 2 .…”

“…The one-photon LIF technique can also be applied to the detection of H, O, and N atoms, although a vacuum ultraviolet (VUV) laser must be used for these atoms [4,[32][33][34][35][36][37]65]. The wavelengths should be 121.6, 130.2, and 120.1 nm, respectively.…”

A Clean Source of B atoms without Using Explosive Boron Compounds

“…One problem with this boron-nitrogen-hydrogen compound is the possible contamination by N atoms. N 2 is fairly stable, 8 but NH 3 can easily be decomposed to NH 2 and H on hot wire surfaces. 9 The incorporation of N atoms cannot completely be avoided.…”