Acousto-optic spectrometer for actinometric investigation of the kinetics of formation and decay of active species in plasmochemical processes

Zhogun, V. N.; Tyablikov, A.; Gazarov, Kh. V.; Bezdenezhnykh, S. V.; Kostin, N. S.

doi:10.1007/bf00986605

Cited by 1 publication

(1 citation statement)

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“…In industrial applications, AOTF spectrometers are used to control plasmochemical etching [11], in particular for precise process timing based on detection of rapid alteration of emission spectra caused by changing composition of substrate being etched at the moment. Besides, AOTF spectrophotometers have found application in accounting liquid products consumption, for example for assessment of ethanol discharge in alcoholic beverage industry by continuous measuring of ethanol concentration in combination with flowmeter.…”

Section: Aotf-based Instrumentsmentioning

confidence: 99%

Spectral instruments based on acousto-optical tunable filters: advantages and prospects

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2008

The Journal of the Acoustical Society of America

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Acoustics 08 Paris 1475Brief review of modern spectral techniques and instruments based on acousto-optical tunable filters (AOTF) is presented. New approaches for spectrometers and spectral systems development are considered. There are presented and described a series of compact spectrometers and spectrophotometers of ultra-violet, visible, and infra-red ranges for Raman, fluorescence, and absorption spectroscopy for various applications, including out-ofdoor measurements, spectroradiometers for environment monitoring (open air, Earth surface, and depth seawater), specialised spectral equipment for industrial monitoring (microelectronics, alcoholometry), imaging spectral devices, and instruments for differential spectroscopy. Also some fundamental problems of AOTF-based spectroscopy are considered: spectrogram correction of instrument function distortions, spectral resolution of different methods, modulation techniques for instrument function synthesizing, optimization of measurement procedures, including adaptive algorithms. Basic trends of past 30 year's AOTF-based spectroscopy development are formulated. The most promising ideas are discussed.

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Section: Aotf-based Instrumentsmentioning

confidence: 99%