Acoustic wave microsensors. Part II

Grate, Jay W.; Martin, Stephen J.; White, Richard M.

doi:10.1021/ac00070a002

Cited by 98 publications

(63 citation statements)

References 51 publications

(94 reference statements)

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“…The results of this analysis demonstrate the potential of the SAW instrument for selective measurement of perchloroethylene among a library set of common vapors and are consistent with more exhaustive studies in which the capabilities of SAW sensor arrays for mixture analysis were characterized. (17,(26)(27)(28)(29)(30)(31)(32)(33)37) The calibration protocols employed for the field study were simplified compared with those used in the laboratory evaluation in order to more accurately reflect the way the instruments would likely be used in practice. The portable GC was pre-and postcalibrated on site using three spiked breath standards having concentrations determined immediately prior to the study using the laboratory reference GC.…”

Section: Field Evaluation Of Saw Microsensor Arraymentioning

confidence: 99%

“…(26)(27)(28) Previous work has shown that an array of 3-6 SAW sensors coated with a set of polymers selected to provide a broad range of solubility interactions can yield characteristic response patterns allowing for the identification and quantification of a large number of individual vapors and components of simple mixtures. (17,(26)(27)(28)(29)(30)(31)(32)(33)37) Laboratory application of SAW-based instrumentation has been described for personal exposure monitoring and chemical protective clothing permeation testing. (26,34) The current study extends previous work that focused on the development and laboratory testing of SAW-based instrumentation for the analysis of organic vapors in breath.…”

Section: Introductionmentioning

confidence: 99%

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Laboratory and Field Evaluation of a SAW Microsensor Array for Measuring Perchloroethylene in Breath

Groves

Achutan

2004

Journal of Occupational and Environmental Hygiene

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This article describes the laboratory and field performance evaluation of a small prototype instrument employing an array of six polymer-coated surface acoustic wave (SAW) sensors and a thermal desorption preconcentration unit for rapid analysis of perchloroethylene in breath. Laboratory calibrations were performed using breath samples spiked with perchloroethylene to prepare calibration standards spanning a concentration range of 0.1-10 ppm. A sample volume of 250 mL was preconcentrated on 40 mg of Tenax GR at a flow rate of 100 mL/min, followed by a dry air purge and thermal desorption at a temperature of 200 degrees C. The resulting pulse of vapor was passed over the sensor array at a flow rate of 20 mL/min and sensor responses were recorded and displayed using a laptop computer. The total time per analysis was 4.5 min. SAW sensor responses were linear, and the instrument's limit of detection was estimated to be 50 ppb based on the criterion that four of the six sensors show a detectable response. Field performance was evaluated at a commercial dry-cleaning operation by comparing prototype instrument results for breath samples with those of a portable gas chromatograph (NIOSH 3704). Four breath samples were collected from a single subject over the course of the workday and analyzed using the portable gas chromatograph (GC) and SAW instruments. An additional seven spiked breath samples were prepared and analyzed so that a broader range of perchloroethylene concentrations could be examined. Linear regression analysis showed excellent agreement between prototype instrument and portable GC breath sample results with a correlation coefficient of 0.99 and a slope of 1.04. The average error for the prototype instrument over a perchloroethylene breath concentration range of 0.9-7.2 ppm was 2.6% relative to the portable GC. These results demonstrate the field capabilities of SAW microsensor arrays for rapid analysis of organic vapors in breath.

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Section: Field Evaluation Of Saw Microsensor Arraymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Laboratory and Field Evaluation of a SAW Microsensor Array for Measuring Perchloroethylene in Breath

Groves

Achutan

2004

Journal of Occupational and Environmental Hygiene

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“…The term is used here only in those material/sensor systems in which simply the mass change due to the sorption can cause a transduction effect [13]. Two types of sorption can be distinguished.…”

Section: Polymer Sorbent Coatingsmentioning

confidence: 99%

Polymer films in sensor applications: a review of present uses and future possibilities

Harsányi

2000

Sensor Review

202

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Polymeric materials have gained a wide theoretical interest and practical application in sensor technology. They can be used for very different purposes and may offer unique possibilities. The paper gives a broad summary about the sensor structures and sensing polymer films used in a wide variety of sensors. Finally, the present status and perspectives as well as the advantages of specific polymer based sensors are summarised.

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“…In the case of mass sensor application as the quartz microbalance, it is well known that the resonant frequency will change due to surface mass change, and the absolute frequency is proportional to the square of the operating frequency. 6,7 Therefore, using FBAR structures, with operation frequency in GHz range, can greatly improve the sensitivity of the device. In fact, chemical sensors based on FBARs have been experimentally investigated for low concentration detection, which showed much higher sensitivity and resolution comparable to quartz crystal microbalances.…”

Section: Introductionmentioning

confidence: 99%

Analysis of dual-mode thin film bulk acoustic resonators based on polar c-axis tilted wurtzite gallium nitride

Qin

Wang

2010

Journal of Applied Physics

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We present the analytical study of dual-mode thin film bulk acoustic resonators (FBARs) based on wurtzite gallium nitride (GaN) thin films with tilted c-axis orientation. The normal-plane and in-plane electric polarization vector components caused by the titled c-axis orientation induce the coexistence of the thickness longitudinal and thickness shear modes in the thin film resonator. Due to the c-axis orientation dependency of material properties including elastic stiffness, dielectric constants, and piezoelectric coefficients, bulk wave properties of FBARs including acoustic velocity and electromechanical coupling coefficient, and electrical impedance spectra are greatly affected by the tilt angle. It is found that the pure longitudinal mode occurs at θ=0° and 66.4°, and the pure shear mode occurs at θ=42.8° and 90°. In addition, the electromechanical coupling coefficient for thickness shear mode has a maximum value 3.18% at θ=34.2°, which is larger than the maximum value for pure thickness longitudinal mode 2.44% at θ=0°. The calculation results show that FBARs based on tilted c-axis wurtzite GaN thin films are promising for frequency control device design and applications.

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Acoustic wave microsensors. Part II

Cited by 98 publications

References 51 publications

Laboratory and Field Evaluation of a SAW Microsensor Array for Measuring Perchloroethylene in Breath

Laboratory and Field Evaluation of a SAW Microsensor Array for Measuring Perchloroethylene in Breath

Polymer films in sensor applications: a review of present uses and future possibilities

Analysis of dual-mode thin film bulk acoustic resonators based on polar c-axis tilted wurtzite gallium nitride

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