“…In general, two different acoustic modes are used for particle manipulation: bulk acoustic waves (BAWs) and SAWs. 45) BAWs are commonly generated on a piezoelectric ceramic element (e.g., PZT), 46) while the SAWs are generated by patterning of the interdigital transducer (IDT) electrodes on a piezoelectric single crystal or piezoelectric thin films (e.g., LiNbO 3 , AlN, and ZnO), 47,48) propagating along the surface of the piezoelectric substrate. Although the SAW-based acoustofluidic technologies have been widely used for one-dimensional (1D), 2D, and even 3D manipulation of particles/cells, 22) the device preparation requires expensive cleanroom fabrication facilities and lengthy fabrication procedures, such as the lift-off and metal evaporation processes for IDT electrodes.…”