“…A Kapton sheet and a protective Teflon sheet were used to insulate the wafer from the surroundings (shown in 8 LeCroy Digital Oscilloscopes, operator's manual, LeCroy. 9 Trek model PZD350 piezo driver/power amplifier, single/dual unit, operators manual, Trek Inc. be controlled exactly. In the future, a fixture will be developed to manufacture the sensors.…”