1997
DOI: 10.1002/(sici)1099-0518(19970115)35:1<77::aid-pola9>3.0.co;2-#
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Acid‐catalyzed degradation mechanism of poly(phthalaldehyde): Unzipping reaction of chemical amplification resist

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Cited by 42 publications
(24 citation statements)
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“…The rate-limiting step is PPHA depolymerization after the initial chain scission ring-opening reaction. 6 Chain scission ring opens the cyclic polymer and activates (deprotects) the newly created chain ends, initiating the rapid depolymerization of PPHA back to monomer. 11 First order reaction kinetics and an Arrhenius relationship for the rate constant was used to describe the PPHA degradation rate, Equation 1.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The rate-limiting step is PPHA depolymerization after the initial chain scission ring-opening reaction. 6 Chain scission ring opens the cyclic polymer and activates (deprotects) the newly created chain ends, initiating the rapid depolymerization of PPHA back to monomer. 11 First order reaction kinetics and an Arrhenius relationship for the rate constant was used to describe the PPHA degradation rate, Equation 1.…”
Section: Resultsmentioning
confidence: 99%
“…PPHA is a self‐immolative polymer where breaking an acetal linkage in the cyclic PPHA polymer backbone leads to cascading chain unzipping resulting in the polymer reverting back to its monomer form at temperatures above its ceiling temperature, ca. −42°C …”
Section: Introductionmentioning
confidence: 99%
“…The reaction scheme is shown in Figure 2a. [25] Upon ring-opening of cyclic PPHA, the end-group unprotected PPHA would rapidly depolymerize back to oPA due to its low ceiling temperature nature. [24], ensured the formation of high molecular PPHA until the reaction equilibrium was achieved.…”
Section: Wwwadvelectronicmatdementioning
confidence: 99%
“…The removal of the kinetic‐trap can induce rapid, unzipping depolymerization at room temperature . The PPHA backbone is susceptible to cleavage via free‐acid protonation of the acetal linkage . A recent study used polymeric thermal acid generators, such as poly(vinyl t‐butyl carbonate sulfone), to increase the depolymerization kinetics at low temperature .…”
Section: Introductionmentioning
confidence: 99%
“…13,14 The PPHA backbone is susceptible to cleavage via free-acid protonation of the acetal linkage. 15 A recent study used polymeric thermal acid generators, such as poly(vinyl t-butyl carbonate sulfone), to increase the depolymerization kinetics at low temperature. 16 A specific-ion coactivation effect at the surface of cyclic PPHA microcapsules has been shown to accelerate depolymerization in acidic methanol solution.…”
Section: Introductionmentioning
confidence: 99%