Accurate vertical nanoelectromechanical measurements
R. Proksch,
R. Wagner,
J. Lefever
Abstract:Piezoresponse Force Microscopy (PFM) is capable of detecting strains in piezoelectric materials down to the picometer range. Driven by diverse application areas, numerous weaker electromechanical materials have emerged. The smaller signals associated with them have uncovered ubiquitous crosstalk challenges that limit the accuracy of measurements and that can even mask them entirely. Previously, using an interferometric displacement sensor (IDS), we demonstrated the existence of a special spot position immediat… Show more
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