Abstract:Herein, novel neural network (NN) methods that improve prediction accuracy and reduce output variance of the optimized input in the gradient method for cross‐sectional data are proposed, and the variability evaluation approach of optimized inputs in the semiconductor process is suggested. Specifically, electrical parameter measurements (EPMs) and power‐delay product of industrial high‐k metal gate DRAM peripheral 29‐stage ring oscillator circuits, including NMOS, PMOS, and interconnects, are focused on. The pr… Show more
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