Accurate multiplexed test structure for threshold voltage matching evaluation

An innovative standard cells remapping method for in-circuit critical parameters monitoring

“…In this case the voltage across it is always equal to 0V: the capacitor can never charge nor discharge and does not influence the ring oscillator frequency, it is "cancelled" [6]. 1 2 3 …”

“…This leads to an increasingly complex manufacturing process that needs to be strictly monitored in order to keep a good yield. Hence, a growing number of parameters are electrically measured thanks to devices in test structures located between the product chips in the wafer scribe lines [1]. The inherent problem of these structures is precisely their location: the electrical and physical environment is not the same as inside circuits.…”