1999
DOI: 10.1063/1.370809
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Accurate method for determining adhesion of cantilever beams

Abstract: Using surface micromachined samples, we demonstrate the accurate measurement of cantilever beam adhesion by using test structures which are adhered over long attachment lengths. We show that this configuration has a deep energy well, such that a fracture equilibrium is easily reached. When compared to the commonly used method of determining the shortest attached beam, the present method is much less sensitive to variations in surface topography or to details of capillary drying.

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Cited by 239 publications
(172 citation statements)
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“…The elastocapillary length ec corresponds to the minimal length above which capillary forces can bring the sheets together and has been identified previously in studies of the failure of micro-mechanical structures upon drying (Mastrangelo & Hsu 1993;de Boer & Michalske 1999) or hair clumping (Bico et al 2004). The scale eg is an elastogravity length.…”
Section: Experimental Setup and Dimensionless Numbersmentioning
confidence: 97%
“…The elastocapillary length ec corresponds to the minimal length above which capillary forces can bring the sheets together and has been identified previously in studies of the failure of micro-mechanical structures upon drying (Mastrangelo & Hsu 1993;de Boer & Michalske 1999) or hair clumping (Bico et al 2004). The scale eg is an elastogravity length.…”
Section: Experimental Setup and Dimensionless Numbersmentioning
confidence: 97%
“…When a CNT is in a s-shape configuration [28], it forms a line-contact with the underlying surface as shown in Fig. 1 and thus interfacial adhesion is greatest during this stage of peeling.…”
Section: Nanotube Configurations During Peeling: Point-and Line-contactmentioning
confidence: 99%
“…1 and thus interfacial adhesion is greatest during this stage of peeling. In the arc-shape configuration [28], the CNT only forms a point-contact and thus interfacial adhesion is small. Because the external applied force acts through a known distance, the area under the force-displacement curve indicates the amount of work in opening the peeling point or crack tip.…”
Section: Nanotube Configurations During Peeling: Point-and Line-contactmentioning
confidence: 99%
“…We discuss the possible equilibrium configurations of the beam actuator. Of these, two stable configurations exist beyond pull-in, denoted as pinned (arc-type) and flat (S-type) configurations [20,21]. The beam with free end not touching the dielectric surface is called floating.…”
Section: Introductionmentioning
confidence: 99%