Accurate measurements of the acoustical physical constants of synthetic /spl alpha/-quartz for SAW devices

Kushibiki, J.; Takanaga, Izumi; Nishiyama, Shinichi

doi:10.1109/58.981390

Cited by 62 publications

(37 citation statements)

References 19 publications

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“…In SiO 2 case, our calculated e 11 (0.181 C/m 2 ) is in good agreement with the experimental data, obtained by Kushibiki et al [20] (0.180 C/m 2 ) and the value reported by Cady [25] (0.172 C/ m 2 ). It also has relatively difference for e 14 , that may be owing to the strong temperature effect on e 14 [26,27].…”

Section: Piezoelectric Propertiessupporting

confidence: 94%

Structure, elastic and piezoelectric properties of A 3 BO 7 (A = Ga, Al; B = P, As) compounds: A DFT study

Ren

et al. 2015

Computational Materials Science

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Section: Piezoelectric Propertiessupporting

confidence: 94%

Structure, elastic and piezoelectric properties of A 3 BO 7 (A = Ga, Al; B = P, As) compounds: A DFT study

Ren

et al. 2015

Computational Materials Science

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“…An important difference, however, is the choice of the substrate material. In this work, monocrystalline, 4-inch Z-cut quartz wafers (Microchemicals) were used in order to minimize internal stresses arising due to the mismatch of the thermal expansion coefficients—α (α α-Fe = 11.8 × 10 −6 K −1 [ 48 ]; α α-Mn = 21.7 × 10 −6 K −1 [ 48 ]; α γ-FeMn30 ≈ 18 × 10 −6 K −1 [ 49 ]; α Si = 2.6 × 10 −6 K −1 [ 48 ] α α-SiO2 ⊥Z = 13.7 × 10 −6 K −1 [ 50 ])—and the elevated substrate temperatures T S = 250 °C.…”

Section: Methodsmentioning

confidence: 99%

Magnetron Sputtering as a Fabrication Method for a Biodegradable Fe32Mn Alloy

2017

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Biodegradable metals are a topic of great interest and Fe-based materials are prominent examples. The research task is to find a suitable compromise between mechanical, corrosion, and magnetic properties. For this purpose, investigations regarding alternative fabrication processes are important. In the present study, magnetron sputtering technology in combination with UV-lithography was used in order to fabricate freestanding, microstructured Fe32Mn films. To adjust the microstructure and crystalline phase composition with respect to the requirements, the foils were post-deposition annealed under a reducing atmosphere. The microstructure and crystalline phase composition were investigated by scanning electron microscopy, energy dispersive X-ray spectroscopy, and X-ray diffraction. Furthermore, for mechanical characterization, uniaxial tensile tests were performed. The in vitro corrosion rates were determined by electrochemical polarization measurements in pseudo-physiological solution. Additionally, the magnetic properties were measured via vibrating sample magnetometry. The foils showed a fine-grained structure and a tensile strength of 712 MPa, which is approximately a factor of two higher compared to the sputtered pure Fe reference material. The yield strength was observed to be even higher than values reported in literature for alloys with similar composition. Against expectations, the corrosion rates were found to be lower in comparison to pure Fe. Since the annealed foils exist in the austenitic, and antiferromagnetic γ-phase, an additional advantage of the FeMn foils is the low magnetic saturation polarization of 0.003 T, compared to Fe with 1.978 T. This value is even lower compared to the SS 316L steel acting as a gold standard for implants, and thus enhances the MRI compatibility of the material. The study demonstrates that magnetron sputtering in combination with UV-lithography is a new concept for the fabrication of already in situ geometrically structured FeMn-based foils with promising mechanical and magnetic properties.

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“…The constant determination procedure with the UMS technology for this point group crystal has been developed previously [7].…”

Section: Procedures Of Determining Constantsmentioning

confidence: 99%

“…According to the procedure of the constant determination [7], we obtained acoustical physical constants at 20, 23, and 26°C from the results of bulk wave velocities. The result at 23°C was shown in Table I Table I. V.…”

Section: Determtn a Non Of Constantsmentioning

confidence: 99%

Determination method of acoustical physical constants and their temperature coefficients of La<inf>3</inf>Ta<inf>0.5</inf>Ga<inf>5.3</inf>Al<inf>0.2</inf>O<inf>14</inf> single crystal

Ohashi

Yoshida

Arakawa

et al. 2012

2012 IEEE International Ultrasonics Symposium

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A determination method of accurate acoustical physical constants and their temperature coefficients was demonstrated for La3 Tao.SGaS.3Alo.2014 (L TGA) single crystal using the ultrasonic microspectroscopy (UMS) technology combined with the resonance method. Several specimens (X-, Yo, Z-, 29.14°Y-, and 150.86°Y-cut) were prepared from an LTGA ingot. Acoustical physical constants and their temperature coefficients around room temperatures were determined using the longitudinal-and shear-wave velocities measured by the UMS system, dielectric constants, density, and thermal expansion coefficients. Measured leaky surface acoustic wave (LSA W) velocities and calculated ones using the determined constants at 23°C were compared, resulting in good agreement within -3.0 to 1.1 m/s for all propagation directions. Using four X-cut rotated Y-bar (_30oy, ooy, 15°Y, 30°Y) specimens and Y-cut specimen prepared from the same ingot, the temperature coefficients in a range from -30 to 80°C were also obtained by the resonance method. Combining the temperature coefficients obtained by the resonance method with the accurate constants obtained by the UMS technology, we can determine more reliable constants and temperature coefficients.

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Accurate measurements of the acoustical physical constants of synthetic /spl alpha/-quartz for SAW devices

Cited by 62 publications

References 19 publications

Structure, elastic and piezoelectric properties of A 3 BO 7 (A = Ga, Al; B = P, As) compounds: A DFT study

Structure, elastic and piezoelectric properties of A 3 BO 7 (A = Ga, Al; B = P, As) compounds: A DFT study

Magnetron Sputtering as a Fabrication Method for a Biodegradable Fe32Mn Alloy

Determination method of acoustical physical constants and their temperature coefficients of La<inf>3</inf>Ta<inf>0.5</inf>Ga<inf>5.3</inf>Al<inf>0.2</inf>O<inf>14</inf> single crystal

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