Accuracy improvement of surface measurement through phase correction in spectrally resolved interferometer

Zhang, Mengsi; Wang, Zhiyuan; Luo, Songjie; Ji, Xuanxuan; Chen, Ziyang; Pu, Jixiong

doi:10.1016/j.optlaseng.2023.107540

Cited by 4 publications

(2 citation statements)

References 23 publications

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“…Denoting the change of a 1 and a 0 as Δa 1 and Δa 0 caused by phase noise, the measurement error in value of z s can be reduced by using the value of a 0 when the values of a 0 and a 1 have the high possibility to exhibit the opposite change trend (Δa 1 × Δa 0 < 0). According to our research [22], it has been demonstrated through simulation that the occurrence of Δa 1 × Δa 0 < 0 is significantly more probable than that of Δa 1 × Δa 0 > 0 under the influence of various noises. It is beneficial in reducing measurement error by using a 0 considering the overall measurement result.…”

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confidence: 79%

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Exact surface measurement based on phase error insensitive method for white-light scanning interferometer

Ji,

Luo,

Sasaki

et al. 2024

Surf. Topogr.: Metrol. Prop.

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Phase error induced by the scanning error of piezoelectric transducer and vibration in white-light interference signal (WLIS) impose limitations on measurement accuracy. In this paper, two techniques are investigated to eliminate phase error cooperatively. A monochromatic interferometer owning the same optical path as the white-light scanning interferometer (WLSI) is employed to detect and compensate the phase error. Due to the incomplete consistency between the detected phase error and its actual distribution, an algorithm is introduced to further enhance the measurement accuracy. The simulation is given to prove the proposed method is available in different magnitude of noise. In the experiment, the front surface of wedged window is measured, whose maximum fluctuations are reduced to 28.8 nm and 3.0 nm from 62.7 nm with the gradual application of two technologies, and the repeatability reach 5.0 nm and 0.4 nm from 16.8 nm, respectively. The root mean square height Sq and maximum height Sz ultimately decrease to 1.3 nm and 1.6 nm. The measurement of step with height of about 3.0 m also has the good accuracy and repeatability after phase error elimination. Since the different reflectivity of measured surfaces in the wavelength range of light source will also bring the measurement error, its influences are analyzed by simulation. The proposed techniques provide a phase error insensitive method for WLSI that has potential on measurement in the complex environment.

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confidence: 79%

“…The linear component of j c (σ) expressed as a 1 σ+a 0 is acquired by using the least square fitting method. The coefficient a 1 is a commonly used to determine the position of the reflecting surface [9,22].…”

Section: = -+mentioning

confidence: 99%

Exact surface measurement based on phase error insensitive method for white-light scanning interferometer

Ji,

Luo,

Sasaki

et al. 2024

Surf. Topogr.: Metrol. Prop.

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show abstract

Experimental and simulation investigation of stereo-DIC via a deep learning algorithm based on initial speckle positioning technology

Dai,

Wei,

Gao

et al. 2024

Appl. Opt.

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For the deep-learning-based stereo-digital image correlation technique, the initial speckle position is crucial as it influences the accuracy of the generated dataset and deformation fields. To ensure measurement accuracy, an optimized extrinsic parameter estimation algorithm is proposed in this study to determine the rotation and translation matrix of the plane in which the speckle is located between the world coordinate system and the left camera coordinate system. First, the accuracy of different extrinsic parameter estimation algorithms was studied by simulations. Subsequently, the dataset of stereo speckle images was generated using the optimized extrinsic parameters. Finally, the improved dual-branch CNN deconvolution architecture was proposed to output displacements and strains simultaneously. Simulation results indicate that DAS-Net exhibits enhanced expressive capabilities, as evidenced by a reduction in displacement errors compared to previous research. The experimental results reveal that the mean absolute percentage error between the stereo-DIC results and the generated dataset is less than 2%, suggesting that the initial speckle positioning technology effectively minimizes the discrepancy between the images in the dataset and those obtained experimentally. Furthermore, the DAS-Net algorithm accurately measures the displacement and strain fields as well as their morphological characteristics.

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Theoretical Analysis of the Spectral Microscopy Interference with Low Coherence Light Source

Zheng,

Cui,

et al. 2024

Preprint

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Accuracy improvement of surface measurement through phase correction in spectrally resolved interferometer

Cited by 4 publications

References 23 publications

Exact surface measurement based on phase error insensitive method for white-light scanning interferometer

Exact surface measurement based on phase error insensitive method for white-light scanning interferometer

Experimental and simulation investigation of stereo-DIC via a deep learning algorithm based on initial speckle positioning technology

Theoretical Analysis of the Spectral Microscopy Interference with Low Coherence Light Source

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