Accuracy analysis of simplified and rigorous numerical methods applied to binary nanopatterning gratings in non-paraxial domain

Conditions for Minimizing the Computational Complexity of the RCWA Calculation of the Diffraction Efficiency of Sawtooth Two-Layer Double-Relief Microstructures

“…In several previous studies, the results of using a rigorous diffraction theory based on the solution of Maxwell equations for calculating the DE of multilayer sawtooth microstructures have been presented [6][7][8][9]11,12,[20][21][22][23][24][25][26].…”

Comparison of electromagnetic and scalar methods for evaluation of efficiency of diffractive lenses for wide spectral bandwidth

“…However, at very great relief depths, the reliability of the SDT prognosis with respect to the angular DE dependency of the reliefphase structures requires additional verification. This is because a considerable amount of publications are devoted to DE conformity assessment analysis, obtained using SDT and based on rigorous theory of diffraction (see, for example [6][7][8][9]). However, such analysis is not available concerning the angular dependency of the DE in the first diffraction order of the microstructures with the total relief depth λ ≥ -h (30 40) min .…”