Accounting for the Complex Surface Structure in Ellipsometric Studies of the Effects of Magnetron Sputtering Modes on the Growth and Optical Properties of In2O3 Films

Tikhii, A. A.; Nikolaenko, Yu. M.; Gritskih, V. A.; Svyrydova, K. A.; Murga, V. V.; Zhikhareva, Yu. I.; Zhikharev, I. V.

doi:10.1007/s10812-018-0625-5

J Appl Spectrosc

2018

DOI: 10.1007/s10812-018-0625-5

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Accounting for the Complex Surface Structure in Ellipsometric Studies of the Effects of Magnetron Sputtering Modes on the Growth and Optical Properties of In2O3 Films

A. A. Tikhii

Yu. M. Nikolaenko

V. A. Gritskih

et al.

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2024

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Morphology and Optical Characteristics of TiO2 Nanofilms Grown by Atomic-Layer Deposition on a Macroporous Silicon Substrate

Turdaliev,

Ashurov,

Ashurov

2024

J Appl Spectrosc

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Morphology and Optical Characteristics of TiO2 Nanofilms Grown by Atomic-Layer Deposition on a Macroporous Silicon Substrate

Turdaliev,

Ashurov,

Ashurov

2024

J Appl Spectrosc

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Accounting for the Complex Surface Structure in Ellipsometric Studies of the Effects of Magnetron Sputtering Modes on the Growth and Optical Properties of In2O3 Films

Cited by 1 publication

References 12 publications

Morphology and Optical Characteristics of TiO2 Nanofilms Grown by Atomic-Layer Deposition on a Macroporous Silicon Substrate

Morphology and Optical Characteristics of TiO2 Nanofilms Grown by Atomic-Layer Deposition on a Macroporous Silicon Substrate

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