AC transfer function of electrostatic capacitive sensors based on the 1-D equivalent model: application to silicon microphones

Nadal-Guardia, R.; Brosa, A.M.; Dehe, A.

doi:10.1109/jmems.2003.820290

Cited by 33 publications

(39 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Nadal-Guardia et al used onedimensional lumped model of parallel plate electrostatic transducers and studied its dynamic behavior [8]. The authors presented an electromechanical coupled dynamic model of the microbeam subjected to electrostatic force [9].…”

Section: Introductionmentioning

confidence: 99%

Electromechanical Coupled Forced Responses for Microplate

2014

Advances in Mechanical Engineering

View full text Add to dashboard Cite

The electromechanical coupled forced response of the microplate subjected to electrostatic force is investigated. Using electromechanical coupled dynamic equations and the mode superposition method, the forced responses of the microplate to voltage excitation and load excitation are analyzed, respectively. Based on this, the coupled forced responses of the micrplate to voltage and load excitations are obtained. Beat vibration caused by the coupled response is investigated and the condition that the beat vibration occurs is determined.

show abstract

Section: Introductionmentioning

confidence: 99%

Electromechanical Coupled Forced Responses for Microplate

2014

Advances in Mechanical Engineering

View full text Add to dashboard Cite

show abstract

“…9 A common modeling approach to evaluate the performance of a microphone is the lumped-element method. [10][11][12][13][14][15] In this approach, through the use of simple analytical expressions, mass, compliance, and damping have their equivalent electrical counterparts in inductance, capacitance, and resistance, respectively. The lumped-element method, as exemplified by the analysis of Gabrielson, 3 has been very popular with many authors.…”

Section: Introductionmentioning

confidence: 99%

Modified Škvor/Starr approach in the mechanical-thermal noise analysis of condenser microphone

Tan

Miao

2009

The Journal of the Acoustical Society of America

View full text Add to dashboard Cite

Simple analytical expressions of mechanical resistance, such as those formulated by Skvor/Starr, are widely used to describe the mechanical-thermal noise performance of a condenser microphone. However, the Skvor/Starr approach does not consider the location effect of acoustic holes in the backplate and overestimates the total equivalent mechanical resistance and mechanical-thermal noise. In this paper, a modified form of the Skvor/Starr approach is proposed to address this hole location dependent effect. A mode shape factor, which consists of the zero order Bessel and modified Bessel functions, is included in Skvor's mechanical resistance formulation to consider the effect of the hole location in the backplate. With reference to two B&K microphones, the theoretical results of the A-weighted mechanical-thermal noise obtained by the modified Skvor/Starr approach are in good agreements with those reported experimental ones.

show abstract

“…Flat frequency response at high frequency, however, can be obtained by proper design of membrane resonance and damping [11,12,[14][15][16][17]. After all, optimally designed acoustic holes and slots in the backplate get better with reduced back pressure loading, due to air squeezing damper between membrane and backplate.…”

Section: Introductionmentioning

confidence: 99%