2011
DOI: 10.1109/tps.2011.2162592
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AC Bipolar Pulsed Power Supply for Reactive Magnetron Sputtering

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Cited by 4 publications
(4 citation statements)
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“…The load current is offered by the capacitor storage energy at previous switching period. When Q switched on, current flows in the primary, and energy is stored in the transformer inductance [1].As seen in Figure 4 the current direction in both case when O ON and OFF. In the discontinuous mode, the circuit topology results in a smaller inductor but put larger stress on the capacitor and switching device as shown in Figure 5 [7].…”
Section: Flyback Convertermentioning
confidence: 99%
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“…The load current is offered by the capacitor storage energy at previous switching period. When Q switched on, current flows in the primary, and energy is stored in the transformer inductance [1].As seen in Figure 4 the current direction in both case when O ON and OFF. In the discontinuous mode, the circuit topology results in a smaller inductor but put larger stress on the capacitor and switching device as shown in Figure 5 [7].…”
Section: Flyback Convertermentioning
confidence: 99%
“…The input voltage is corrected and the DC voltage is applied to the DC-DC convertor. During this study, flyback SMPS are going to be selected for the development of the new ESG for ESU system [1]. This is the result of the output power levels (150 Watts), as the planning for the electrical device is comparatively straightforward.…”
Section: Electrosurgical Power Supply DC To Dc Convertermentioning
confidence: 99%
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“…Pulsed dc MS presents high sputtering yields with high plasma density, long-term process stability, enhanced dynamic deposition rates [12,19], and improved deposition speed and film quality [20]. These excellent properties make it the most attractive technology for commercial needs, being suitable for large-scale deposition of high-quality films at low temperature and being suitable for use on polymeric substrates [21,22]. Nevertheless, in order to optimize the deposition process and the films obtained, indepth research is required so as to understand the influence of growth conditions on the structure and optoelectronic properties of the coatings.…”
Section: Evaluation Of the Optoelectronic Properties And Corrosion Be...mentioning
confidence: 99%