AC and DC voltage standards based on silicon micromechanics

Suhonen, Mika; Seppä, Heikki; Oja, Aarne; Heinila, M.; Näkki, Ismo

doi:10.1109/cpem.1998.699739

Cited by 36 publications

(21 citation statements)

References 1 publication

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“…Thus, by measuring the displacement of the movable capacitor plate or by measuring the force needed to keep the plate in its initial position, the (square of the) rms voltage amplitude of the ac signal can be obtained. This effect has been exploited to realize micro-mechanical rms-to-dc converters [4][5][6][7]. Seppä et al [2] proposed to exploit this principle for measuring the power level on transmission lines at very high frequencies, i.e., in the GHz range.…”

Section: Principle Of Operationmentioning

confidence: 99%

A capacitive RF power sensor based on MEMS technology

Fernández

Wiegerink

Flokstra

et al. 2006

J. Micromech. Microeng.

104

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Wideband 100 kHz-4 GHz power sensors are presented, which are based on sensing the electrostatic force between an RF signal line and a suspended membrane. The electrostatic force, which is proportional to the square of the rms signal voltage and thus to the signal power, results in a displacement of the suspended membrane. This displacement is detected capacitively, allowing the sensing of the signal power with extremely low dissipative losses; therefore the sensor can be placed in a transmission line with negligible disturbance of the signal. Devices have been designed and fabricated successfully by aluminum surface micromachining using photoresist as the sacrificial layer. Optimization of the design with SONNET has resulted in measured return and insertion losses (S 11 and S 21 ) better than −30 dB and −0.15 dB, respectively, up to 4 GHz, and a sensitivity of 90 aF mW -1 .

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Section: Principle Of Operationmentioning

confidence: 99%

A capacitive RF power sensor based on MEMS technology

Fernández

Wiegerink

Flokstra

et al. 2006

J. Micromech. Microeng.

104

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“…Basic principal of AC and DC MEMS-based voltage references was provided by [1] for the first time. They introduced a microsized parallel-moving plate capacitor which is used in a simple circuit to provide a reference voltage.…”

Section: Introductionmentioning

confidence: 99%

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Ranjbar

Mehrnezhad

Suratgar

2017

Journal of Control Science and Engineering

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The accuracy of physical parameters of a tunable MEMS capacitor, as the major part of MEMS AC voltage reference, is of great importance to achieve an accurate output voltage free of the malfunctioning noise and disturbance. Even though strenuous endeavors are made to fabricate MEMS tunable capacitors with desiderated accurate physical characteristics and ameliorate exactness of physical parameters' values, parametric uncertainties ineluctably emerge in fabrication process attributable to imperfections in micromachining process. First off, this paper considers applying an adaptive sliding mode controller design in the MEMS AC voltage reference source so that it is capable of giving off a well-regulated output voltage in defiance of jumbling parametric uncertainties in the plant dynamics and also aggravating external disturbance imposed on the system. Secondly, it puts an investigatory comparison with the designed model reference adaptive controller and the pole-placement state feedback one into one's prospective. Not only does the tuned adaptive sliding mode controller show remarkable robustness against slow parameter variation and external disturbance being compared to the pole-placement state feedback one, but also it immensely gets robust against the external disturbance in comparison with the conventional adaptive controller. The simulation results are promising.

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“…Si maintenant l'actionnement de la structure illustrée en figure 1 est assuré par un courant AC sinusoïdal d'amplitude I RMS et de pulsation ω, la force électrique devient alors indépendante de la position x de l'électrode mobile, et l'amplitude de la tension AC aux bornes des électrodes peut s'écrire selon (4) [3] :…”

Section: Principe Des Références De Tension Memsunclassified

“…À partir de dispositifs MEMS constitués de membranes, de poutres ou de bascules, les premières applications en métrologie électrique ont vu le jour vers 1995 avec les premiers convertisseurs alternatif-continu (AC-DC) constitués d'une bascule dans laquelle on réa-lise l'équilibre entre les forces électriques engendrées par des tensions AC et DC [1,2]. Par la suite, plusieurs équipes de recherche ont montré d'autres possibilités d'applications des MEMS pour la métrologie électrique : références de tension AC et DC [3][4][5][6], convertisseurs AC-DC [7,8], référence de courant et diviseur de tension basse fréquence [9,10], et capteurs de puissance haute fréquence [11][12][13].…”

Section: Introductionunclassified