Absorption enhancement of 980nm MSM photodetector with a plasmonic grating structure

Tan, Chee Leong; Лысак, В.В.; Alameh, Kamal; Lee, Yong Tak

doi:10.1016/j.optcom.2009.11.044

Cited by 46 publications

(25 citation statements)

References 16 publications

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“…normalized power transmittance of the same device without a metal nanograting [10,11]. Figure 6 shows the simulated light absorption enhancement factor spectra of MSM-PD structures with different aperture widths, namely, 50 nm, 100 nm, and 200 nm.…”

Section: Resultsmentioning

confidence: 99%

“…Figure 3 illustrates a plasmonic-based MSM-PD structure, which consists of three separate layers, namely, (i) a top layer (metal nanograting), (ii) an unperturbed metal layer (underlayer) containing conventional sub-wavelength apertures, and (iii) a semiconductor (GaAs) substrate. For a metal nanograting with the period of Λ, the wave vector of the excited SPPs (k sp ) is given by [1,[8][9][10][11] …”

Section: Experimental Observation Of Nanograting Phase Shift In Msm-pdmentioning

confidence: 99%

“…Several theoretical and experimental results have been reported on the extraordinary optical transmission through the sub-wavelength metallic apertures, and metal gratings [7][8][9][10][11][12][13][14][15][16][17][18][19][20]. Based on finite-difference time-domain (FDTD) simulation, results have shown significant enhancement of light absorption through interaction with surface plasmon polaritons (SPPs) for the design of MSM-PDs [1,[5][6][7][8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

“…Based on finite-difference time-domain (FDTD) simulation, results have shown significant enhancement of light absorption through interaction with surface plasmon polaritons (SPPs) for the design of MSM-PDs [1,[5][6][7][8][9][10][11]. In this paper, the FDTD method is used to simulate the light absorption enhancement in a GaAs MSM-PD structure, wherein the metal fingers are structured to form a metal nanograting above an unperturbed part of the metal fingers.…”

Section: Introductionmentioning

confidence: 99%

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Impact of Nanograting Phase-Shift on Light Absorption Enhancement in Plasmonics-Based Metal-Semiconductor-Metal Photodetectors

Das

Karar

Tan

et al. 2011

Advances in Optical Technologies

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The finite difference time-domain (FDTD) method is used to simulate the light absorption enhancement in a plasmonic metalsemiconductor-metal photodetector (MSM-PD) structure employing a metal nanograting with phase shifts. The metal fingers of the MSM-PDs are etched at appropriate depths to maximize light absorption through plasmonic effects into a subwavelength aperture. We also analyse the nano-grating phase shift and groove profiles obtained typically in our experiments using focused ion beam milling and atomic force microscopy and discuss the dependency of light absorption enhancement on the nano-gratings phase shift and groove profiles inscribed into MSM-PDs. Our simulation results show that the nano-grating phase shift blue-shifts the wavelength at which the light absorption enhancement is maximum, and that the combined effects of the nano-grating groove shape and phase shift degrade the light absorption enhancement by up to 50%.

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Section: Resultsmentioning

confidence: 99%

Section: Experimental Observation Of Nanograting Phase Shift In Msm-pdmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Impact of Nanograting Phase-Shift on Light Absorption Enhancement in Plasmonics-Based Metal-Semiconductor-Metal Photodetectors

Das

Karar

Tan

et al. 2011

Advances in Optical Technologies

Self Cite

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“…A carefully designed nano-antenna positioned on top of a photodetector, which is smaller in size than the wavelength of the incident light, can be used to collect more photons. There are many experimental and computational examples reported for such devices from the near-IR to visible spectrum [2][3][4][5][6][7][8]. However, there is not many research reported on plasmonic structures in the UV region.…”

Section: Introductionmentioning

confidence: 99%

Nanoantenna coupled UV subwavelength photodetectors based on GaN

Bütün¹,

Cinel²,

Özbay³

2012

Opt. Express

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Abstract:The integration of nano structures with opto-electronic devices has many potential applications. It allows the coupling of more light into or out of the device while decreasing the size of the device itself. Such devices are reported in the VIS and NIR regions. However, making plasmonic structures for the UV region is still a challenge. Here, we report on a UV nano-antenna integrated metal semiconductor metal (MSM) photodetector based on GaN. We designed and fabricated Al grating structures. Well defined plasmonic resonances were measured in the reflectance spectra. Optimized grating structure integrated photodetectors exhibited more than sevenfold photocurrent enhancement. Finite difference time domain simulations revealed that both geometrical and plasmonic effects played role in photocurrent enhancement. ©2012 Optical Society of America

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Wafer‐Scale Fabrication of Graphene‐Based Plasmonic Photodetector with Polarization‐Sensitive, Broadband, and Enhanced Response

Fan

Sun

Shi

et al. 2023

Advanced Optical Materials

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Graphene‐based photodetectors draw tremendous interests for broadband photodetection in optical communications, sensing, and hyperspectral imaging. However, the extremely low light absorption coefficient of graphene posts a great challenge for high‐efficiency photodetection. Although plasmonic nanostructures provide resonant absorption enhancement and impressive responsivity, the current fabrication techniques suffer from being time‐consuming, low‐yield, and potentially high‐cost. In this work, a wafer‐scale graphene‐Au nanogratings (Gra‐Au NGs) plasmonic photodetector array is fabricated via two‐beam holographic lithography, which achieves a photosensitive area of 1 mm2, showing balanced abilities of polarization‐sensitive, broadband, and enhanced photoresponse from visible to near‐infrared regions. The maximum polarization extinction ratio and responsivity of the Gra‐Au NGs photodetector reach 6.65 and 2.95 mA W−1. The surface plasmon resonance of Au NGs and near‐field coupling with graphene render strong electric field confinement and enhanced light absorption, which improve the device photoresponse and polarization sensitivity. The hot electrons generation and transportation models in the Gra‐Au NGs heterojunction are proposed, perfectly matching with the photocurrent mapping and equalized energy band distribution. This work enlightens the wafer‐scale fabrication of graphene‐based plasmonic photodetectors, and it can trigger the advances of free‐space detection, such as remote sensing and satellite communication.

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Absorption enhancement of 980nm MSM photodetector with a plasmonic grating structure

Cited by 46 publications

References 16 publications

Impact of Nanograting Phase-Shift on Light Absorption Enhancement in Plasmonics-Based Metal-Semiconductor-Metal Photodetectors

Impact of Nanograting Phase-Shift on Light Absorption Enhancement in Plasmonics-Based Metal-Semiconductor-Metal Photodetectors

Nanoantenna coupled UV subwavelength photodetectors based on GaN

Wafer‐Scale Fabrication of Graphene‐Based Plasmonic Photodetector with Polarization‐Sensitive, Broadband, and Enhanced Response

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