Absolute soft x-ray calibration of laser produced plasmas using a focusing crystal von Hamos spectrometer

Abstract

Absolute x-ray calibration of laser-produced plasmas was performed using a focusing crystal von Hamos spectrometer. The plasmas were created by an Nd-YAG laser on massive solid targets (Mg, Cu, Zn, Sn, Mo, Ta, Ti, Steel). A Cylindrical mica crystal and a CCD linear array detector were used in the spectrometer. Both the mica crystal and CCD linear array were absolutely calibrated in the spectral range of λ=7 -15 Å. The spectrometer was used for absolute spectral measurements and the determination of the plasma parameters. The unique target design allowed for multiple instruments to observe the plasma simultaneously which improved analysis. The high spectrometer efficiency allowed for the monitoring of absolute x-ray spectra, x-ray yield and plasma parameters in each laser shot. This spectrometer is promising for absolute spectral measurements and for monitoring laser-plasma sources intended for proximity print lithography.