2013
DOI: 10.1117/12.2021022
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Absolute scale-based imaging position encoder with submicron accuracy

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Cited by 11 publications
(4 citation statements)
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“…For the measurement coordinates the energy center of the image using high-precision iterative algoritm 8 . Consider the limiting case: 1) Displacement to the distance R r m ≥ + (Figure 10), where m -displacement vignetting area about the center of the matrix analyzer, r -radius of vignetting area, R -half side of the image on the matrix analyzer.…”
Section: The Compensation Algorithm Of Systematic Errormentioning
confidence: 99%
“…For the measurement coordinates the energy center of the image using high-precision iterative algoritm 8 . Consider the limiting case: 1) Displacement to the distance R r m ≥ + (Figure 10), where m -displacement vignetting area about the center of the matrix analyzer, r -radius of vignetting area, R -half side of the image on the matrix analyzer.…”
Section: The Compensation Algorithm Of Systematic Errormentioning
confidence: 99%
“…Compared to (2), (4) can improve at least twice the measurement accuracy and 3-5 orders the magnitude resolution. …”
Section: Mechanismmentioning
confidence: 99%
“…Linear optical encoders with one-dimensional position measurement can significantly improve the displacement precision of computer numerical control (CNC) machine tools, resulting in excellent machine reliability and operability [1,2]. For most of commercial optical linear position encoders, a precise glass scale is etched into the chromium layer that covers the glass.…”
Section: Introductionmentioning
confidence: 99%
“…Распространение получили измерители на ПЗС-матрицах с последую-щей цифровой обработкой для нахождения центра тяжести пятна рассеяния на чувствительных элемен-тах [1][2][3][4][5][6][7][8][9][10][11]. При этом для получения высокой точности измерений используется осреднение за N считы-ваний матрицы.…”
Section: Introductionunclassified