Absolute Photon Counting in the Ultraviolet

Heroux, L.

doi:10.1016/b978-0-12-710402-7.50011-3

Spectrometric Techniques 1981

DOI: 10.1016/b978-0-12-710402-7.50011-3

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Absolute Photon Counting in the Ultraviolet

L. Heroux

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1984

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A Soft X-ray Experimental Facility

et al. 1984

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A high vacuum soft x-ray source has been coupled to a large volume experimental chamber to provide a versatile facility for x-ray investigations in the energy range of 0.1 to 10 kev. The source chamber presently contains a modified Herike tube, but can employ any of a variety of source designs. The large experimental chamber is equipped with a kinematic mount to position a number of x-ray optical instruments. The source and experimental chambers are connected through a high vacuum valve/shutter, and are pumped separately with provision for a thin window to isolate one from the other, single and double crystal spectrometers have been used in the experimental chamber. A variable chord diffractometer/reflectometer using double crystal monnotiromatization has been designed, in addition, the facility has been used to expose photoresists in x-ray lithography tests.

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A Soft X-ray Experimental Facility

et al. 1984

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Absolute Photon Counting in the Ultraviolet

Cited by 1 publication

References 51 publications

A Soft X-ray Experimental Facility

A Soft X-ray Experimental Facility

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