Abrasive jet micro-machining of planar areas and transitional slopes in glass using target oscillation

Ghobeity, Amin; Papini, M.; Spelt, J.K.

doi:10.1016/j.jmatprotec.2009.02.012

Cited by 34 publications

(19 citation statements)

References 17 publications

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“…Successful fabrication using this method is highly dependent on the abrasive particles used, pressure and work piece material; however, typically it is difficult to attain a high quality and precise features due to the relative hardness and brittleness of glass. Whilst an effective process for creating features or holes, the relative inflexibility of the method combined with the poor feature quality in glass make this technique less common than micromilling (Ghobeity et al 2009;). • Water jet cutting is an effective method of sectioning or creating through features (such as holes) in glass.…”

Section: Alternative Methodsmentioning

confidence: 99%

Lab-on-a-Chip Devices and Micro-Total Analysis Systems

Castillo-León¹,

Svendsen²

2015

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Section: Alternative Methodsmentioning

confidence: 99%

Lab-on-a-Chip Devices and Micro-Total Analysis Systems

Castillo-León¹,

Svendsen²

2015

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“…In the past, two procedures have been developed to perform such machining: (i) the oscillating abrasive jet method, which is best for machining to a single depth [117], and (ii) the multiple pass method, which is more general and can produce eroded areas having arbitrarily varying depths [116]. In the second method, the final eroded surface is the result of a number of overlapping nozzle passes, each of them having a unique standoff distance, offset from the previous pass, and scan speed [116].…”

Section: Cajm Of Other Featuresmentioning

confidence: 99%

Abrasive Jet Micro-Machining of Polymeric Materials

Hailu¹

2023

Preprint

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In the abrasive jet micro-machining (AJM) process, a jet of small particles is directed through an erosion resistant mask opening so that micro-sized features (i.e., micro-channels, holes, etc.) can be machined for the fabrication of micro-devices such as micro-fluidic and micro-electro-mechanical-systems (MEMS). Polymeric materials and elastomers have found applications in a wide variety of micro-devices. This thesis investigates the AJM of such materials, addressing the major challenges that must be overcome in order for the process to gain wider acceptance in industry. The thesis first presents a novel cryogenically assisted abrasive jet micro-machining (CAJM) technique that enables the micro-machining of elastomers such as polydimethylsiloxane (PDMS) that cannot be machined at room temperature. It was found that the erosion rate during CAJM is greatly increased, and the degree of particle embedment greatly decreased, compared to room temperature experiments. A finite element (FE) analysis was used to investigate the relationships between erosion, the heat transfer of the cooling jet and the resulting target temperature during the CAJM of channels in PDMS. The analysis illustrated the asymmetric nature of the cooling with much more cooling occurring towards the trailing edge of the jet. It was found that the predicted shape of the evolving machined surface profiles was improved significantly when a FE model was used to account for thermal distortion occurring during the CAJM process. An unwanted consequence of the AJM of polymeric materials was found to be particle embedding. Criteria leading to the embedding of spherical and angular particles in such materials were identified and modelled using rigid plastic analyses. It was found that the likelihood of embedding was proportional to the static coefficient of friction between the particle and the target for angular particles, and the depth of penetration for spherical particles. Scanning electron microscopy with EDX was used to measure the area coverage of embedded Al2O3 particles in polymers and elastomers, in order to evaluate various cleaning methods that were developed. It was found that glass bead blasting at 45˚ followed by the freezing technique was the best method to remove embedded particles, leading to 100% removal in some cases.

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“…The most beneficial situation, therefore, is to perform AJM with the jet incident perpendicular to the surface, where the erosion is maximized for the target and cured mask, and minimized for the uncured mask. However, there are situations where use of an inclined jet is necessary, such as, e.g., when creating features with an abrupt change in depth [68]. In this case, curves such as Fig.…”

Section: Erosion Rate Of Uncured Rm Cured Rm and Borosilicate Glassmentioning

confidence: 99%

Effect of curing parameters and configuration on the efficacy of ultraviolet light curing self-adhesive masks used for abrasive jet micro-machining and microfluidic device fabrication

Ahmadzadeh¹

2021

Preprint

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Soft lithography techniques has been used widely in the past decade to fabricate microfluidic chips used in biomedical applications. Abrasive jet machining (AJM) has been used to fabricate similar chips using particle erosion mechanisms. This thesis proposes a new technique using a UV light sensitive self-adhesive mask (RapidMask) and AJM to fabricate a three dimensional flow focusing microfluidic chip where the depth of the channel is allowed to vary along the channel length. A detailed characterization of the effect of curing parameters of a UV light curing self-adhesive mask on the resulting feature resolution is reported. Instead of relying on the manufacturer recommended curing parameters which were vaguely described for specific UV curing units, it was found that measured energy density could be used to quantify a recommended cure that is independent of the curing unit. The best achievable pattern on borosilicate glass using RM and AJM was found and reported along with the erosion rates of uncured, cured RM during AJM. A new methodology was introduced to use multiple layers of the RM in order to increase the achievable feature aspect ratio. The results of the RM curing and multiple layer investigation were then used to fabricate a three dimensional flow focusing chip with a varying depth at the focusing junction. The chip was then sealed and tested to demonstrate its capabilities and potential in healthcare and biomedical applications. To the best knowledge of the author, this thesis is the first to report using a double layer RM to fabricate a microfluidic chip using AJM.

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Abrasive jet micro-machining of planar areas and transitional slopes in glass using target oscillation

Cited by 34 publications

References 17 publications

Lab-on-a-Chip Devices and Micro-Total Analysis Systems

Lab-on-a-Chip Devices and Micro-Total Analysis Systems

Abrasive Jet Micro-Machining of Polymeric Materials

Effect of curing parameters and configuration on the efficacy of ultraviolet light curing self-adhesive masks used for abrasive jet micro-machining and microfluidic device fabrication

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