About the use of electron energy-loss spectroscopy for chemical mapping of thin foils with high spatial resolution

Jeanguillaume, Christian; Trebbia, P.; Colliex, C.

doi:10.1016/s0304-3991(78)80030-8

Cited by 114 publications

(37 citation statements)

References 5 publications

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“…The sample was analyzed at places where the electrons transit only through the pure Fe layer (with Al-capping), at a thickness of t T EM = 19 ± 2 nm. Images of the illumination spot on the sample were acquired before and after the series to verify that the sample did not drift during acquisition and to determine the Three-dimensional data sets, so called data cubes [15], are constructed from the acquired EFDIF patterns and represent the fast electron beam intensity as function of energy-loss and scattering vector: I(k x , k y , E). The experimental data cubes consist of the (k x , k y ) diffraction planes stacked according to the energy-loss of the fast electrons, which represents the third dimension.…”

Section: Reciprocal Space Mapsmentioning

confidence: 99%

Reciprocal and real space maps for EMCD experiments

et al. 2010

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Electron magnetic chiral dichroism (EMCD) is an emerging tool for quantitative measurements of magnetic properties using the transmission electron microscope (TEM), with the possibility of nanometer resolution. The geometrical conditions, data treatment and electron gun settings are found to influence the EMCD signal. In this article, particular care is taken to obtain a reliable quantitative measurement of the ratio of orbital to spin magnetic moment using energy filtered diffraction patterns. For this purpose, we describe a method for data treatment, normalization and selection of mirror axis. The experimental results are supported by theoretical simulations based on dynamical diffraction and density functional theory. Special settings of the electron gun, so called telefocus mode, enable a higher intensity of the electron beam, as well as a reduction of the influence from artifacts on the signal. Using these settings, we demonstrate the principle of acquiring real space maps of the EMCD signal. This enables advanced characterization of magnetic materials with superior spatial resolution.

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Section: Reciprocal Space Mapsmentioning

confidence: 99%

Reciprocal and real space maps for EMCD experiments

et al. 2010

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“…3 EFTEM images from the Mn/PdMn multilayer specimen are shown: elemental maps (three window technique) as well as jump ratio images (two window technique) [17,18]. The acquisition parameters for these images are listed in (Table 1).…”

Section: Mn/pdmn Multilayer Specimenmentioning

confidence: 99%

Energy-filtering TEM at high magnification: spatial resolution and detection limits

et al. 2003

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Energy-filtering TEM (EFTEM) has turned out to be a very efficient and rapid tool for the chemical characterization of a specimen on a nanometer and even subnanometer length scale. Especially, the detection and measurement of very thin layers has become a great application of this technique in many materials science fields, e.g. semiconductors and hard disk technology. There, the reliability of compositional profiles is an important issue. However, the experimentally obtainable spatial resolution strongly influences the appearance of a thin layer in an EFTEM image, when dimensions reach subnanometer levels, which mainly leads to a broadening of the layer in the image. This fact has to be taken into account, when measuring the thickness of such a thin layer. Additionally, the convolution decreases contrast which makes the layer less visible in the image and finally determines the detection limit.In this work we present a systematic study on specifically designed Mn/PdMn multilayer test specimens to explore the practical aspects of spatial resolution and detection limits in EFTEM. Although specific to the ionization edges used, we will present general conclusions about the practical limitations in terms of EFTEM spatial resolution. Additionally, work will be shown about low energy-loss imaging of thin oxide layers, where delocalization is the main factor responsible for broadening. r

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“…The other images have been masked in a similar way and the global mask has been selected as the union of all these masks. 4. Linear optimal filtering from geostatistical models.…”

Section: Eels Instrumentation For Data Acquisitionmentioning

confidence: 99%

“…Hence a single energy filtered image does not constitute a useful map of the spatial distribution of the chemical element. As proposed by Jeanguillaume et al [4], it is essential to record a sequence of energy filtered images and to extrapolate, for each pixel, the information contained in the energy channels before the edge. One can then discriminate the characteristic signal from the background in the intensity measured for an energy loss above the edge.…”

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confidence: 99%