Ablation characteristics of Au, Ag, and Cu metals using a femtosecond Ti:sapphire laser

Furusawa, K.; Takahashi, Kenjiro; Kumagai, Hiroshi; Midorikawa, Katsumi; Obara, Minoru

doi:10.1007/s003390051417

Cited by 213 publications

(114 citation statements)

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“…In comparison to other metals such as gold, silver, aluminum, and copper, tin has higher thresholds. 12,16,18 The high-fluence threshold of gold, for example, is reported to be 0.9 J/cm 2 at roughly 150 fs (Refs. 18 and 22) and 1.7 J/cm 2 at almost 800 fs.…”

Section: B Peak Fluence Dependencementioning

confidence: 99%

“…13 Since the 1990s, many experiments have been performed and models developed 2,3 for laser-matter interaction at this particular time scale. Target materials used are metals such as gold, silver, copper, and aluminum, 5,12,[14][15][16][17][18][19][20][21] and non-metals such as silicon [22][23][24][25] and metal oxides, [26][27][28] among others. 29,30 Most of these studies are conducted in a femtosecond pulse length range from 50 fs up to approximately 1 ps and a pulse fluence up to 10 J/cm 2 .…”

Section: Introductionmentioning

confidence: 99%

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Ion distribution and ablation depth measurements of a fs-ps laser-irradiated solid tin target

Deuzeman

Stodolna

Leerssen

et al. 2017

Journal of Applied Physics

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Ion distribution and ablation depth measurements of a fs-ps laser-irradiated solid tin target Deuzeman, M. J.; Stodolna, A. S.; Leerssen, E. E. B.; Antoncecchi, A.; Spook, N.; Kleijntjens, T.; Versluis, J.; Witte, S.; Eikema, K. S. E.; Ubachs, W. Link to publication in University of Groningen/UMCG research database Citation for published version (APA): Deuzeman, M. J., Stodolna, A. S., Leerssen, E. E. B., Antoncecchi, A., Spook, N., Kleijntjens, T., ... Versolato, O. O. (2017). Ion distribution and ablation depth measurements of a fs-ps laser-irradiated solid tin target. Journal of Applied Physics, 121(10), [103301]. https://doi.org/10.1063/1.4977854 Copyright Other than for strictly personal use, it is not permitted to download or to forward/distribute the text or part of it without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license (like Creative Commons).Take-down policy If you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. Ion distribution and ablation depth measurements of a fs-ps laser-irradiated solid tin target The ablation of solid tin surfaces by a 800-nanometer-wavelength laser is studied for a pulse length range from 500 fs to 4.5 ps and a fluence range spanning from 0.9 to 22 J/cm 2 . The ablation depth and volume are obtained employing a high-numerical-aperture optical microscope, while the ion yield and energy distributions are obtained from a set of Faraday cups set up under various angles. We found a slight increase of the ion yield for an increasing pulse length, while the ablation depth is slightly decreasing. The ablation volume remained constant as a function of pulse length. The ablation depth follows a two-region logarithmic dependence on the fluence, in agreement with the available literature and theory. In the examined fluence range, the ion yield angular distribution is sharply peaked along the target normal at low fluences but rapidly broadens with increasing fluence. The total ionization fraction increases monotonically with fluence to a 5%-6% maximum, which is substantially lower than the typical ionization fractions obtained with nanosecond-pulse ablation. The angular distribution of the ions does not depend on the laser pulse length within the measurement uncertainty. These results are of particular interest for the possible utilization of fs-ps laser systems in plasma sources of extreme ultraviolet light for nanolithography. Published by AIP Publishing. [http://dx

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Section: B Peak Fluence Dependencementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Ion distribution and ablation depth measurements of a fs-ps laser-irradiated solid tin target

Deuzeman

Stodolna

Leerssen

et al. 2017

Journal of Applied Physics

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“…For metals, the TTM is widely employed to describe temporal and spatial evolution of electron and lattice temperatures. 1 Simpler theoretical approaches to laser ablation couple TTM to assumptions about the kinetics of matter emission, 21,22,37 while MD and HM methods combined with TTM are employed for more quantitative descriptions of the process. [3][4][5][6][7][8][9] These studies are often complicated by the fact that the physical parameters involved ͑electron-phonon coupling coefficient and electron thermal conductivity, e.g.͒ in the highly nonequilibrium regime induced by ultrashort laser irradiation are in general not very well known and still under investigation, 38 and approximation should be normally used.…”

Section: Ablation Threshold and Ablation Ratementioning

confidence: 99%

Dynamics of the plumes produced by ultrafast laser ablation of metals

Donnelly¹,

Lunney²,

Amoruso³

et al. 2010

Journal of Applied Physics

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We have analyzed ultrafast laser ablation of a metallic target ͑Nickel͒ in high vacuum addressing both expansion dynamics of the various plume components ͑ionic and nanoparticle͒ and basic properties of the ultrafast laser ablation process. While the ion temporal profile and ion angular distribution were analyzed by means of Langmuir ion probe technique, the angular distribution of the nanoparticulate component was characterized by measuring the thickness map of deposition on a transparent substrate. The amount of ablated material per pulse was found by applying scanning white light interferometry to craters produced on a stationary target. We have also compared the angular distribution of both the ionic and nanoparticle components with the Anisimov model. While the agreement for the ion angular distribution is very good at any laser fluence ͑from ablation threshold up to Ϸ1 J/ cm 2 ͒, some discrepancies of nanoparticle plume angular distribution at fluencies above Ϸ0.4 J / cm 2 are interpreted in terms of the influence of the pressure exerted by the nascent atomic plasma plume on the initial hydrodynamic evolution of the nanoparticle component. Finally, analyses of the fluence threshold and maximum ablation depth were also carried out, and compared to predictions of theoretical models. Our results indicate that the absorbed energy is spread over a length comparable with the electron diffusion depth L c ͑Ϸ30 nm͒ of Ni on the timescale of electron-phonon equilibration and that a logarithmic dependence is well-suited for the description of the variation in the ablation depth on laser fluence in the investigated range.

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“…2) For the analysis of femtosecond pulse laser interactions with metals, the two-temperature model (TTM) has been widely used to describe electron-phonon interactions and non-equilibrium heat transfer in metallic thin films. [5][6][7][8][9][10][11] Because the electron-electron interaction time (the order of hundred femtoseconds) is shorter than the electron-phonon interaction time (on the order of picoseconds), a strong nonequilibrium occurs between the electrons and phonons under the irradiation of femtosecond laser pulses. The thermal equilibrium among the excited electrons is reached within a few hundred femtoseconds, depending on the excitation energy above the Fermi level.…”

Section: Introductionmentioning

confidence: 99%

Comparison of Theoretical Models of Electron-Phonon Coupling in Thin Gold Films Irradiated by Femtosecond Pulse Lasers

2011

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This study reports on a comparison of theoretical models for electron-phonon coupling that is substantially associated with nonequilibrium energy transport in thin gold films irradiated by femtosecond pulse lasers. Three published electron-phonon coupling models were analyzed with the use of a well-established two-temperature model to describe non-equilibrium energy transport between electrons and phonons. Based on the numerical results, at lower fluence, all models showed nearly similar tendencies, whereas at higher fluence, constant electronphonon coupling forced unrealistically long electron-phonon equilibration times and spatially long diffusive regions as it failed to intrinsically consider the effect of a high number density of excited d-band electrons. Even at higher fluence, however, both Lin's and Chen's models yielded physically reasonable results, showing converging electron-phonon equilibration times and steep gradients in the spatial lattice temperature profiles at higher laser fluence. In particular, Lin's model predicts nonlinear characteristics of heat capacity and lattice temperature with respect to laser fluence better than Chen's model. Moreover, the electron-phonon relaxation time increased with laser fluence, whereas at laser fluence greater than 0.05 J/cm 2 , the thermal equilibrium time was nearly independent of the laser fluence. Thus, it was concluded that Lin's model better predicted the electron-phonon coupling phenomena in thin metal films irradiated by ultra-short pulse lasers.

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Ablation characteristics of Au, Ag, and Cu metals using a femtosecond Ti:sapphire laser

Cited by 213 publications

References 1 publication

Ion distribution and ablation depth measurements of a fs-ps laser-irradiated solid tin target

Ion distribution and ablation depth measurements of a fs-ps laser-irradiated solid tin target

Dynamics of the plumes produced by ultrafast laser ablation of metals

Comparison of Theoretical Models of Electron-Phonon Coupling in Thin Gold Films Irradiated by Femtosecond Pulse Lasers

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