“…The XRD patterns of the AlCrNbTi oxide films grown at different U sync are shown in Fig. 3 where the identical peak positions for this compound also shifts to lower angles as compared with corundum-Al 2 O 3 due to the increased lattice constant [27]. For the films grown with U float and U sync = − 100 V, low peak intensities corresponding to the growth of (110) and (300) planes is seen, revealing low film crystallinity.…”