Titanium dioxide nanotube arrays (TNTAs) are a typical three-dimensional nanomaterial. TNTA has rich chemical and physical properties and low manufacturing costs. Thus, TNTA has broad application prospects. In recent years, research has shown that because of its large specific surface area and nanosize effect, the TNTAs have an enormous potential for development compared with other nanostructure forms in fields such as light catalysis, sensor, and solar batteries. TNTAs have become the hotspot of international nanometer material research. The tiny gas sensor made from TNTA has several advantages, such as fast response, high sensitivity, and small size. Several scholars in this field have achieved significant progress. As a sensitive material, TNTA is used to test O 2 , NO 2 , H 2 , ethanol, and other gases. In this chapter, three SF 6 decomposed gases, namely SO 2 , SOF 2 and SO 2 F 2 , are chosen as probe gases because they are the main by-products in the decomposition of SF 6 under PD. Then, the adsorption behaviors of these gases on different anatase (101) surfaces including intrinsic, Pt-doped and Au-doped, are studied using the first principles density functional theory (DFT) calculations. The simulation results can be used as supplement for gas-sensing experiments of TNTA gas sensors. This work is expected to add insights into the fundamental understanding of interactions between gases and TNTA surfaces for better sensor design.