AACVD of WO₃ thin films from W(O)(OPrⁱ)₃[O(CH₂)_nNMe₂] (n = 2, 3)

Abstract

Monomeric tungsten oxo-aminoalkoxides W(O)(OPr

Synthesis of tungsten oxo fluoroalkoxide complexes WO(OR)3L as precursors for growth of WOx nanomaterials by aerosol-assisted chemical vapor deposition

“…Oxygen-bound ligands such as oxo, alkoxide, β-diketonate and β-ketoesterate moieties have found use in single source precursors for the deposition of metal oxides because the preexisting metal oxygen bonding can facilitate conversion of the precursor to the oxide material during deposition [25,[34][35][36]. We have previously demonstrated that oxo alkoxide complexes of the type WO(OR) 4 (R = C(CH 3 ) 2 CF 3 and C(CF 3 ) 2 CH 3 ) and the dioxo derivative WO 2 (OR) 2 L (R = C(CF 3 ) 2 CH 3 , L = DME) are low temperature precursors to WO x films and nanorods, consistent with incorporation of the terminal oxo moieties into the deposits [23,41,42].…”

“…Single source precursors for deposition of WO x include tungsten alkoxide complexes [25,27,[34][35][36][37]. However, these complexes are air-and water-sensitive, which complicates their practical use.…”

“…However, these complexes are air-and water-sensitive, which complicates their practical use. Modification of these complexes with chelating ligands has been reported to improve their stability and a series of these WO(OR) 3 L complexes has been demonstrated to serve as viable precursors for AACVD of WO x films and nanostructures [9,36,38]. Fluorination of ligands has been shown to increase the volatility of complexes as a result of decreased intermolecular interactions due to the repulsion produced by the fluorine atoms [39,40].…”

Synthesis of heterobimetallic tungsten acetylacetonate/alkoxide complexes and their application as molecular precursors to metal tungstates

“…Such films are usually produced either by hydrolysis of a suitable precursor in a sol-gel protocol, [7] or by chemical vapour deposition (CVD) from a volatile precursor. [8][9][10] The properties of these films can be modified by the inclusion of a variety of additional metals, [11][12][13] which from a technological perspective require co-hydrolysis of two metal moieties (sol-gel) or a dual-source CVD approach. One variation which removes the practical difficulties of matching hydrolysis / decomposition rates is the use of a single-source precursor (SSP) which incorporates both metals in the same molecule.…”

The synthesis of W–O–W μ-oxo clusters by hydrolysis of tungsten aminoalkoxides and their structural characterisation

“…Hbdmap 8 was prepared by literature method; [W(O)(O i Pr) 4 ] 2 and W(O)(OPr i ) 3 (dmae) (1) were prepared as described elsewhere. 9 Synthesis of W(O)(OPr i ) 3 (bdmap) (2). [W(O)(O i Pr) 4 ] 2 (3.00 g, 6.87 mmol) was dissolved in toluene (ca.…”