A07 Precision Control of Magnetic Drive Actuator for Laser Cutting

Abstract

This paper describes an adaptive control method fbr a magnetic drive actUator that used fbr the laser cutting tQ realize high speed and high accuracy machining ． Firstly ， a zero bias。urrent method and a nenlinear cempensator are examined and used fbr 廿1e actuator ． Secondly ， an adaptive control method is presented 、 Finally ， the coefficient of the gap −current −fbrce is estirnated and the effectiveness of the presented control methed is verified by experiments ． The experirnentaL results shew that the coef 五cient ofthe gap − current − fbrce reduces exponentially depending on 出 e increase in the length ofthe air gap， By using the adaptive control ， the peak − to − peak vibratien amplitude ofthe lens holder is reduced from l． 95 μ m to l55 μ m ． Moreover， the