A Wireless Embedded Resonant Pressure Sensor Fabricated in the Standard LTCC Technology

Abstract

This paper proposes a fully embedded resonant pressure sensor operating in the MHz range and realized in the standard low-temperature co-fired ceramics (LTCC) technology. Buried sensor design and usage of LTCC materials enable application of this sensor in high-temperature and chemically aggressive environments. Upgraded sensor and sensor-antenna models residing on an analytical concept are used for prediction of the system performance. Also, simulation results show that an increase of Young's modulus for the LTCC tape diminishes the sensor sensitivity. An experimental setup for wireless data retrieval is designed enabling precise measurement of the influence of pressure variation on the sensors resonant frequency. Experimentally attained results are compared with electrical characteristics determined by analytical calculations as well as those derived from electrical simulations.Index Terms-Embedded resonant pressure sensor, low-temperature co-fired ceramics (LTCC) technology, modeling and simulation of LTCC pressure sensor.

Thermomechanical properties and performance of ceramic resonators for wireless pressure reading at high temperatures

“…Radosavljevi et al have reported an LTCC-based wireless pressure sensor for use in chemically aggressive environments [23]. The sensor is a fully embedded LC resonating circuit, and consists of a cavity having both a top and a bottom diaphragm.…”

Overview on low temperature co-fired ceramic sensors

“…Beside of these simplest examples, pressure sensors are also popular [16][17][18][19][20]. The high piezoresistive effect seen in thick-film resistors enables the fabrication of LTCC piezoresistive force sensors [20] or uniaxial accelerometers [21].…”

A Two-Stage Process for Laser Prototyping of Microwave Circuits in LTCC Technology

“…LTCC has the additional benefit compared to HTCC that it allows the use of high conductivity metals like gold, silver and copper, which are essential for low loss microwave and millimeter-wave passive elements. The applications of LTCC technology are not limited to electronic packaging but also include MEMS packaging, microfluidics [10][11][12], sensors, actuators [13][14][15], etc. Thus, technological advancement in LTCC technology benefits multiple fields and the integration of high frequency components is key for realizing a wide range of wireless sensing systems -particularly in harsh environments where ceramic materials have a significant advantage over organic-based substrate materials.…”