A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process

Xu, Wei; Lijin, Beiqi; Duan, Mingzheng; Wang, Xiaoyi; Wicaksana, Jeffry; Min, Ai; Ahmed, Moaaz; Wang, Ruijin; Fang, Nicholas X.; Bermak, Amine; Lee, Yi-Kuen

doi:10.1109/memsys.2018.8346682

Cited by 19 publications

(14 citation statements)

References 8 publications

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“…This experiment used nitrogen gas and a gas generator to control the flow rate, and the gas pipe was connected to the tubing containing the micro flow sensor. The flow rates of the N 2 gas (in SCCM (cm/s)) in the tube were controlled to 25.65 (5), 51.3 (10), 77 (15), 102.6 (20), 128 (25), 154 (30), 179.5 (35), and 205.2 SCCM (40 cm/s) (the numerical value in parentheses indicates the velocity of the fluid inside the tubing). A signal monitoring system performed real-time checks on the output voltage, whereas nitrogen (N 2 ) gas flowed at a specific flow rate from the gas generator to the micro flow sensor.…”

Section: Experimental Results For Gas Flowmentioning

confidence: 99%

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Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor

Cho

Jang

Lim

2021

Sensors

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Based on the results of computational fluid dynamics simulations, this study designed and fabricated a flexible thermal-type micro flow sensor comprising one microheater and two thermistors using a micro-electromechanical system (MEMS) process on a flexible polyimide film. The thermistors were connected to a Wheatstone bridge circuit, and the resistance difference between the thermistors resulting from the generation of a flow was converted into an output voltage signal using LabVIEW software. A mini tube flow test was conducted to demonstrate the sensor’s detection of fluid velocity in gas and liquid flows. A good correlation was found between the experimental results and the simulation data. However, the results for the gas and liquid flows differed in that for gas, the output voltage increased with the fluid’s velocity and decreased against the liquid’s flow velocity. This study’s MEMS-based flexible microthermal flow sensor achieved a resolution of 1.1 cm/s in a liquid flow and 0.64 cm/s in a gas flow, respectively, within a fluid flow velocity range of 0–40 cm/s. The sensor is suitable for many applications; however, with some adaptations to its electrical packaging, it will be particularly suitable for detecting biosignals in healthcare applications, including measuring respiration and body fluids.

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Section: Experimental Results For Gas Flowmentioning

confidence: 99%

“…The developed sensor detected a signal fluid flow as low as 300 nL/min [13]. Ahmed et al developed a wireless, dual-mode, low-powered, calorimetric-based complementary metal-oxide semiconductor MEMS flow sensor to measure bidirectional gas [14,15].…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor

Cho

Jang

Lim

2021

Sensors

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“…(F) Schematic presentation of a sensing array mechanism, 3-D structure and experimental design of three-mode biocompatible liquid sensing system based on parylene membrane [78]. (G) Schematic drawing and photography of Dual-mode micro thermal flow (DMTF) with the sensing potential in both hot-film and calorimetric mode [71]. (H) Schematic view of an octagonal Eight-Trigrams symbol and the layout of a MEMS thermal wind sensor inspired by this structure [107].…”

Section: Silicon-based Hot-wire/film Mems Thermal Flow Sensorsmentioning

confidence: 99%

Design and applications of MEMS flow sensors: A review

Ejeian

Azadi

Razmjou

et al. 2019

Sensors and Actuators A: Physical

274

125

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“…Wang et al (2018) apresentam a implementação de um microssensor do tipo hot-wire dentro de um encapsulamento de circuito integrado, visando sua utilização no contexto de alta potência. Noâmbito da Internet das Coisas (IoT), Xu et al (2018) lançaram mão de recursos da tecnologia MEMS e da CMOS para desenvolver o protótipo de um módulo sensor wireless com intuito de ser utilizado como nó de redes de sensores. O controle de velocidade de veículos aéreos, tripulados ou não,é outro dos possíveis usos já vislumbrados para os microssensores de fluxo concebidos sob a filosofia MEMS.…”

Section: Microssensores De Fluxounclassified

Projeto de microssensor de fluxo de massa para medição de velocidade de fluidos

Santos

Barbosa

Moreira

2019

Anais Do 14º Simpósio Brasileiro De Automação Inteligente

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In this paper, the main characteristics and steps for design and simulation of a thermal mass flow microsensor of calorimetric type are described, aiming to measure flow rate and fluid velocity. The device was designed computationally and its applicability evaluated based on the simulation data. The results leaded to conclude that flows speed between 0 and 14 m/s can be measured using the proposed sensor. Resumo: Neste trabalho são descritas as principais características e etapas de projeto e simulação de um microssensor de fluxo de massa do tipo calorimétrico, tendo como objetivo aferir vazão e velocidade de fluidos. O dispositivo foi projetado computacionalmente e sua aplicabilidade avaliada a partir dos resultados de simulação. Os dados obtidos permitiram concluir que a velocidades entre 0 e 14 m/s podem ser mensuradas por meio do aparato proposto.

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A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process

Cited by 19 publications

References 8 publications

Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor

Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor

Design and applications of MEMS flow sensors: A review

Projeto de microssensor de fluxo de massa para medição de velocidade de fluidos

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