Abstract:MEMS devices typically need to be designed against a very low failure probability, which is beyond the capacity of histogram testing. Therefore, the understanding of the probabilistic failure of MEMS devices is crucial for the design process. Currently available probabilistic models for predicting the strength statistics of MEMS structures are based on classical Weibull statistics. Significant advances in experimental techniques for measuring the strength of MEMS devices have produced data that have unambiguou… Show more
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