Abstract:A novel variable optical attenuator is proposed, fabricated, and tested here. The attenuation effect is achieved by changing the curvature of a reflection mirror membrane. In order to demonstrate the proposed principle, concave mirrors with different radii are first used to confirm the attenuation effect. Then a thermal bimorph structure with membrane is used to deform the mirror membrane at different input voltages to show the variable attenuation effect. The size of the mirror membrane, which is made of low-… Show more
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