A universal small-sized vacuum installation for gas-kinetic investigations

“…The high-voltage stabilized source Spellman SL30 (18) is used as a referencevoltage source. The current of an accelerated cluster ion beam is registered using an ion collector (Faraday cup, 14) and an analoguedigital converter (15).…”

Section: Measurements Of Cluster Ion Beammentioning

confidence: 99%

Features of formation of gas cluster ion beams

Korobeishchikov

Kalyada

Skovorodko

et al. 2015

Vacuum

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“…The research was performed using the LEMPUS experimental setup of Novosibirsk State University [10]. The pulse valve with diameter of sonic nozzle 1 mm and the duration of gas pulse ∼1.3 ms was used.…”

Section: Methodsmentioning

confidence: 99%

Pulsed Gas Jets for Formation of High-Intensity Cluster Beams

Korobeishchikov¹,

Zarvin²,

Kalyada³

et al. 2012

AMPC

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The possibility of using of pulsed supersonic gas jets for the formation of high intensity cluster ion beams are discusses. The results of experimental investigations of pulsed gases expansion are generalized in terms of dimensionless similarity parameters. The results of the experimental study of formation of an high-intensity cluster beam of argon are presented. The fundamental phenomenon influences on the main parameters of cluster beam (cluster size, intensity ect.) are considered.

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“…(21) The method of mass-spectrometry of a molecular beam formed from a pulse supersonic jet was used. (22) A device consisting of a pre-chamber with a nozzle opened by a pulse electromagnetic valve, whose construction and main characteristics are described, (23) was used as a jet source.…”

Section: Experimental Equipment and Diagnostic Facilitiesmentioning

confidence: 99%

Condensation of Argon, Monosilane and Their Mixtures in a Pulse Free Jet

Korobeishchikov

Zarvin

Madirbaev

et al. 2005

Plasma Chem Plasma Process

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Pulse supersonic outflow of Ar, SiH 4 and Ar + SiH 4 gas mixture (where monosilane is a small admixture) was studied experimentally by the method of molecular beam mass-spectrometry. Using argon as an example we have shown that condensation processes at the quasi-stationary region of a pulse flow and within a stationary jet are similar. In the flows of pure gases clusters of argon and silane (hydrogenated silicon) and in the mixture argon -silane complexes were registered. The dependencies of the intensities of monomer and cluster ions on stagnation pressure were investigated. It was shown that in the mixture jet at low stagnation pressures the condensation process with the formation of monosilane clusters takes place and at high pressures mixed argon-silane complexes are formed. The parameters of flow transition into the regime of developed condensation were determined for pure gases and their mixture.

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A universal small-sized vacuum installation for gas-kinetic investigations

Cited by 10 publications

References 1 publication

Features of formation of gas cluster ion beams

Features of formation of gas cluster ion beams

Pulsed Gas Jets for Formation of High-Intensity Cluster Beams

Condensation of Argon, Monosilane and Their Mixtures in a Pulse Free Jet

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