A two-stage aerosol impactor with embedded MEMS resonant mass balances for particulate size segregation and mass concentration monitoring

Mehdizadeh, Esmaeil; Kumar, Vineet; Pourkamali, Siavash; Gonzales, Jonathan; Abdolvand, Reza

doi:10.1109/icsens.2013.6688317

Cited by 12 publications

(8 citation statements)

References 8 publications

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“…where ρ p is the particle density, V o the average air velocity at the nozzle exit, µ is the air viscosity, W is the nozzle diameter and C is the Cunningham slip correction factor [3]. The Reynolds number, on the other hand is related by Marple et al with the efficiency at which the particles will be collected.…”

Section: B Impactor Designmentioning

confidence: 98%

“…The parameters in table 1 were used to calculate the cutoff particulate sizes at each stage. After solving the slip correction factor equation [3] and equation 3, the particle size cut-points were approximated for first and second stage. The cut-point for particle size converges to 105 nm and 9 nm for the first and second stage respectively.…”

Section: B Impactor Designmentioning

confidence: 99%

“…We have previously demonstrated miniaturized aerosol impactors with embedded MEMS resonant mass balances for real time PM concentration monitoring (Fig. 1c) [3]. In MEMS 2015 we demonstrated integration of the whole impactor stage on a single chip.…”

Section: Introductionmentioning

confidence: 97%

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Miniaturized two stage aerosol impactor with chip-scale stages for airborne particulate size separation

et al. 2015

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This work presents integration of two chip-scale realtime aerosol impactor stages within a miniaturized cascade assembly for airborne particulate size segregation and mass concentration measurement. Impaction stages, each comprised of a MEMS resonant microbalance, an impaction micro-chamber and a number of micro-nozzles, all integrated on a single chip, are fabricated using a three mask micromachining process on SOI substrates. Tests were performed in different environments with different particle mass concentrations ranging from 0.012 to 0.13 μg/m 3 (particles larger than ~ 9 nm) show a clear correlation between the resonator response and the expected particle concentrations. SEM images of the deposited particles clearly show a size difference between particles collected in the two stages.

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Section: B Impactor Designmentioning

confidence: 98%

Section: B Impactor Designmentioning

confidence: 99%

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Miniaturized two stage aerosol impactor with chip-scale stages for airborne particulate size separation

et al. 2015

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“…Park et al [12] developed a particle sensor using a paddle-type silicon cantilever and the use of thin-film piezoelectric on silicon resonators has been proposed by Harrington et al [13]. Thermally actuated MEMS resonators were demonstrated for the mass measurement of airborne particles [9,14] and the use of such structures within aerosol impactors for the size separation of particles have been proposed as well [15,16]. The collaboration between the Institute of Semiconductor Technology (IHT) and the Fraunhofer-Wilhelm-Klauditz-Institut led to the development of silicon resonant cantilever sensors for the detection of airborne nanoparticles [17,18] and further work reported the development of portable cantilever-based detectors [19][20][21].…”

Section: Introductionmentioning

confidence: 99%

Particle Sensor Using Solidly Mounted Resonators

et al. 2016

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“…5a). In other studies, this impaction technology had also been used for various devices and described in detail (Mehdizadeh et al, 2013;Schmid et al, 2013). For our Al impactor, its location is adjustable, which influences the velocity of the aerosol flow.…”

Section: Microparticle Filtration Componentsmentioning

confidence: 99%

Partially integrated cantilever-based airborne nanoparticle detector for continuous carbon aerosol mass concentration monitoring

Wasisto

Merzsch

Uhde

et al. 2015

J. Sens. Sens. Syst.

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Abstract. The performance of a low-cost partially integrated cantilever-based airborne nanoparticle (NP) detector (CANTOR-1) is evaluated in terms of its real-time measurement and robustness. The device is used for direct reading of exposure to airborne carbon engineered nanoparticles (ENPs) in indoor workplaces. As the main components, a miniaturized electrostatic aerosol sampler and a piezoresistive resonant silicon cantilever mass sensor are employed to collect the ENPs from the air stream to the cantilever surfaces and to measure their mass concentration, respectively. Moreover, to realize a real-time measurement, a frequency tracking system based on a phase-locked loop (PLL) is built and integrated into the device. Long-term ENP exposure and a wet ultrasonic cleaning method are demonstrated to estimate the limitation and extend the operating lifetime of the developed device, respectively. By means of the device calibrations performed with a standard ENP monitoring instrument of a fast mobility particle sizer (FMPS, TSI 3091), a measurement precision of ENP mass concentrations of < 55 % and a limit of detection (LOD) of < 25 µg m −3 are obtained.

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A two-stage aerosol impactor with embedded MEMS resonant mass balances for particulate size segregation and mass concentration monitoring

Cited by 12 publications

References 8 publications

Miniaturized two stage aerosol impactor with chip-scale stages for airborne particulate size separation

Miniaturized two stage aerosol impactor with chip-scale stages for airborne particulate size separation

Particle Sensor Using Solidly Mounted Resonators

Partially integrated cantilever-based airborne nanoparticle detector for continuous carbon aerosol mass concentration monitoring

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