2015
DOI: 10.1109/tuffc.2014.006796
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A two-layer linear piezoelectric micromotor

Abstract: A first bending (B1) mode two-layer piezoelectric ultrasonic linear micromotor has been developed for microoptics driving applications. The piezo-vibrator of the micromotor was composed of two small Pb(Zr,Ti)O3 (PZT-5) plates, with overall dimensions and mass of only 2.0 × 2.0 × 5.0 mm(3) and 0.2 g, respectively. The proposed micromotor could operate either in single-phase voltage (standing wave) mode or two-phase voltage (traveling wave) mode to drive a slider via friction force to provide bidirectional linea… Show more

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Cited by 40 publications
(17 citation statements)
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“…According to the working mode of PZT, LUSMs have been classified into bonded-type motors [5][6][7][8][9][10][11][12] and bolt-clamped-type motors [13][14][15][16][17][18][19][20]. Recently, bonded-type motors, which are small in size, have attracted many researchers' interests, but their extremely low thrust is a serious drawback.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…According to the working mode of PZT, LUSMs have been classified into bonded-type motors [5][6][7][8][9][10][11][12] and bolt-clamped-type motors [13][14][15][16][17][18][19][20]. Recently, bonded-type motors, which are small in size, have attracted many researchers' interests, but their extremely low thrust is a serious drawback.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, bonded-type motors, which are small in size, have attracted many researchers' interests, but their extremely low thrust is a serious drawback. In particular, some kinds of bonded-type motors' thrusts are below 1 N [5][6][7][8], while a few of the bonded-type motors' thrusts have been improved to reach a value of less than 10 N [9][10][11][12]. Moreover, the excitation voltage, applied on the ceramics, has a limit due to the insulation and weakness of the bond.…”
Section: Introductionmentioning
confidence: 99%
“…According to the output motion modes, piezoelectric motors can currently be classified into: rotary [4][5][6][7][8], linear [9][10][11][12][13] and multi-degree-of-freedom motors [14][15][16][17][18]. The first type has attracted more attention because of its higher applicability in the above system.…”
Section: Introductionmentioning
confidence: 99%
“…Over the past decade, the linear piezoelectric motors have a very significant development and excellent performance, as shown in Table 1 [1]- [19]. If we do not consider the size and the driving condition of the piezoelectric linear motors, their linear moving fastest is a high-power linear ultrasonic motor using bending vibration Table 1.…”
Section: Introductionmentioning
confidence: 99%
“…If we do not consider the size and the driving condition of the piezoelectric linear motors, their linear moving fastest is a high-power linear ultrasonic motor using bending vibration Table 1. The performance comparison of the linear piezoelectric motors [1]- [19]. [19] transducer [15], the ultrasonic linear motor using traveling surface acoustic wave [6] and a linear ultrasonic motor using push-pull type L-B hybrid Langevin transducer with single foot [3].…”
Section: Introductionmentioning
confidence: 99%