2009
DOI: 10.1088/0960-1317/19/12/125004
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A tunable mechanical resonator

Abstract: This paper presents a tunable comb resonator by mechanically altering the suspension configuration to change its spring constant. The change of the stiffness of the resonator is achieved using electrostatic MEMS actuators. The MEMS actuators mechanically change the length of the beams to increase their spring constant and therefore the resonant frequency. The resonant frequency changed from the original value of 10.8 kHz to 17.6 kHz and 21.4 kHz depending on the spring configuration. The tunable mechanical res… Show more

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Cited by 21 publications
(14 citation statements)
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“…Electrostatic comb structures have been the key design elements for comb-drive micromechanical resonators [ 304 , 305 , 306 , 307 , 308 , 309 , 310 , 311 , 312 , 313 , 314 , 315 ]. Multiple tuning approaches have been presented to tune the effective spring constant of the resonators, including parallel-plate [ 20 ], fringing field [ 304 ], and variable gap comb-drives [ 305 , 306 ].…”
Section: Active Frequency Tuning Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Electrostatic comb structures have been the key design elements for comb-drive micromechanical resonators [ 304 , 305 , 306 , 307 , 308 , 309 , 310 , 311 , 312 , 313 , 314 , 315 ]. Multiple tuning approaches have been presented to tune the effective spring constant of the resonators, including parallel-plate [ 20 ], fringing field [ 304 ], and variable gap comb-drives [ 305 , 306 ].…”
Section: Active Frequency Tuning Methodsmentioning
confidence: 99%
“…The resonant frequencies are in the range of 32 102 ± 25 Hz and obey basically the normal distribution. The stiffening or the weakening of the comb allows the resonant frequency to be swept between the multiple frequencies of the comb achieving a very wide tuning range [ 311 ]. Zhong et al .…”
Section: Active Frequency Tuning Methodsmentioning
confidence: 99%
“…21,22 The stiffness of a beam can also be changed by effectively shortening its length by pinching or pressing against it. 7,23,24…”
Section: Introductionmentioning
confidence: 99%
“…Thus, their operating bandwidth can be quite narrow. This has motivated an extraordinary amount of research work on methods to increase the operating bandwidth of VEHs (Daqaq et al 2014;Neiss et al 2014;Roundy et al 2005;Wu et al 2013;Zine-El-Abidine and Yang 2009). Such methods include multi-mode dynamic structures, active frequency tuning by both mechanical and electrical means, and nonlinear dynamic structures.…”
Section: Introductionmentioning
confidence: 99%