A Tube-Shaped Buried Pirani Gauge for Low Detection Limit With Small Footprint

Santagata, F.; Creemer, J.F.; Iervolino, E.; Mele, L.; Herwaarden, A.W. van; Sarro, P.M.

doi:10.1109/jmems.2011.2127457

Cited by 24 publications

(15 citation statements)

References 14 publications

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“…Pirani pressure sensors are an attractive and often used pressure sensor architecture due to their simplicity and robustness as no hermetic cavity, moving parts or accurate deflection measurement methods are required. Current Pirani implementations have typical dimensions of 100 μm x 200 μm with a power consumption of ∼1 mW or more [2]- [4]. The sensitivity and pressure range of these devices is limited as the gap can not be reduced to the nm range.…”

Section: Introductionmentioning

confidence: 99%

A Miniaturized Low Power Pirani Pressure Sensor Based on Suspended Graphene

Romijn

Vollebregt

Dolleman

et al. 2018

2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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Worlds first graphene-based Pirani pressure sensor is presented. Due to the decreased area and low thickness, the graphene-based Pirani pressure sensor allows for low power applications down to 0.9 mW. Using an innovative, transfer-free process, suspended graphene beams are realized. This allows for up to 100x miniaturization of the pressure sensor area, while enabling wafer-scale fabrication. The response of the miniaturized pressure sensor is similar to that of the much larger state-of-the-art Si-based Pirani pressure sensors, demonstrating the potential of graphene-based Pirani sensors.

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Section: Introductionmentioning

confidence: 99%

A Miniaturized Low Power Pirani Pressure Sensor Based on Suspended Graphene

Romijn

Vollebregt

Dolleman

et al. 2018

2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

View full text Add to dashboard Cite

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“…Configuration Sensitivity Footprint Puers et al [3] Quarter-bridge 600 μV/dec 30×3 μm Ghouila-Houri et al [4] Resistive 36 %/dec 1000×4 μm Santagata et al [5] Resistive 17 mV/Pa − 1 4×400 μm Piotto et al [7] Resistive 200 mV/Pa − 1 200×100 μm THIS WORK Resistive 2.5 %/dec 2×5 μm…”

Section: Workmentioning

confidence: 99%

“…The proven analytical Pirani sensor model [2,5] dictates that the suspended strip's electrical conductivity depends on the Joule heating and the temperature coefficient of resis-tance(TCR) of the strip material. Within the operation region determined by the gap, the suspended strip's temperature depends on the thermal conductivity of the surrounding gas.…”

Section: Introductionmentioning

confidence: 99%

Multi-layer graphene pirani pressure sensors

et al. 2021

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The operating principle of Pirani pressure sensors is based on the pressure dependence of a suspended strip's electrical conductivity, caused by the thermal conductance of the surrounding gas which changes the Joule heating of the strip. To realize such sensors, not only materials with high temperature dependent electrical conductivity are required, but also minimization of the suspended strip dimensions is essential to maximize the responsivity and minimize the power consumption. Due to this, nanomaterials are especially attractive for this application. Here, we demonstrate the use of a multi-layer suspended graphene strip as a Pirani pressure sensor and compare its behavior with existing models. A clear pressure dependence of the strip's electrical resistance is observed, with a maximum relative change of 2.75% between 1 and 1000 mbar and a power consumption of 8.5 mW. The use of graphene enables miniaturization of the device footprint by 100 times compared to state-of-the-art. Moreover, miniaturization allows for lower power consumption and/or higher responsivity and the sensor's nanogap enables operation near atmospheric pressure that can be used in applications such as barometers for altitude measurement. Furthermore, we demonstrate that the sensor response depends on the type of gas molecules, which opens up the way to selective gas sensing applications. Finally, the graphene synthesis technology is compatible with wafer-scale fabrication, potentially enabling future chiplevel integration with readout electronics.

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“…In the past decade, the improvement of the Pirani gauge is still ongoing. Santagata et al optimized the traditional structure of a Pirani gauge by creating a tube-shaped device that resulted in improved stiffness and higher sensitivity [2]. Also, advanced materials have been introduced to build Pirani sensors.…”

Section: Introductionmentioning

confidence: 99%

Surface-Micromachined Silicon Carbide Pirani Gauges for Harsh Environments

Middelburg

Morana

et al. 2021

IEEE Sensors J.

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The application of pressure sensors in harsh environments is typically hindered by the stability of the material over long periods of time. This work focuses on the design and fabrication of surface micromachined Pirani gauges which are designed to be compatible with state-of-the-art Silicon Carbide CMOS technology. Such an integrated platform would boost harsh environment compatibility while reducing the required packaging complexity. An analytical model was derived describing the design variables of the Pirani gauges followed by Finite Element Analysis. The Pirani gauges were fabricated in a CMOS compatible cleanroom with a process employing only three masks, thus suitable for mass production. The SiC-based Pirani gauge is far more competitive than the traditional Si-based Pirani gauge in terms of endurance in hightemperature environments. From 25°C to 650°C, the gauge shows a reproducible response to pressure changes and has a maximum sensitivity of 17.63 Ω/Pa at room temperature, and of 1.23 Ω/Pa at 650°C. Additionally, some of the gauges were demonstrated to operate at temperatures up to 750°C.

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A Tube-Shaped Buried Pirani Gauge for Low Detection Limit With Small Footprint

Cited by 24 publications

References 14 publications

A Miniaturized Low Power Pirani Pressure Sensor Based on Suspended Graphene

A Miniaturized Low Power Pirani Pressure Sensor Based on Suspended Graphene

Multi-layer graphene pirani pressure sensors

Surface-Micromachined Silicon Carbide Pirani Gauges for Harsh Environments

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