A Transfer Function Approach to Shock Duration Compensation for Laboratory Evaluation of Ultra-High-G Vacuum-Packaged MEMS Accelerometers

Xu, Kaisi; Zhu, Ning; Jiang, Fushuai; Zhang, Wei

doi:10.1109/memsys.2019.8870797

Cited by 5 publications

(4 citation statements)

References 11 publications

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“…The accuracy of the model was confirmed through numerical analysis results based on Shock Response Spectra (SRS) [ 43 ]. A model for high-g shock response was proposed by Kaisi Xu et al to rapidly estimate the response of MEMS structures using a transfer function [ 44 ].…”

Section: Mems Reliability With Consideration Of Shockmentioning

confidence: 99%

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Xu,

Liu,

et al. 2024

Heliyon

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Section: Mems Reliability With Consideration Of Shockmentioning

confidence: 99%

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Xu,

Liu,

et al. 2024

Heliyon

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“…The study indicated that when the deflection of the cantilever beam exceeds about 30% of its length, the nonlinearity in the response is nonnegligible. In 2019, KS Xu et al [38] proposed a transfer function-based MEMS shock response model, which can quickly estimate the response of the structure.…”

Section: Analytical Modelmentioning

confidence: 99%

Reliability of MEMS in Shock Environments: 2000–2020

Peng

You

2021

Micromachines

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The reliability of MEMS in shock environments is a complex area which involves structural dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of MEMS in automotive, IoT, aerospace and other harsh environments, there is a need for an in-depth understanding of the reliability of MEMS in shock environments. Despite the contributions of many articles that have overviewed the reliability of MEMS panoramically, a review paper that specifically focuses on the reliability research of MEMS in shock environments is, to date, absent. This paper reviews studies which examine the reliability of MEMS in shock environments from 2000 to 2020 in six sub-areas, which are: (i) response model of microstructure, (ii) shock experimental progresses, (iii) shock resistant microstructures, (iv) reliability quantification models of microstructure, (v) electronics-system-level reliability, and (vi) the coupling phenomenon of shock with other factors. This paper fills the gap around overviews of MEMS reliability in shock environments. Through the framework of these six sub-areas, we propose some directions potentially worthy of attention for future research.

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“…Currently, most theoretical investigations on MEMS shock-protected structures concentrate on Single-Degree-of-Freedom (SDOF) and Two-Degree-of-Freedom (TDOF) models. These models analyze the system's response characteristics in the time domain by deriving dynamic equations [19][20][21]. Nevertheless, there is a significant lack of research on shock protection systems in the frequency domain.…”

Section: Introductionmentioning

confidence: 99%

Design of a Shock-Protected Structure for MEMS Gyroscopes over a Full Temperature Range

Xu,

Lin,

et al. 2024

Micromachines

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Impact is the most important factor affecting the reliability of Micro-Electro-Mechanical System (MEMS) gyroscopes, therefore corresponding reliability design is very essential. This paper proposes a shock-protected structure (SPS) capable of withstanding a full temperature range from −40 °C to 80 °C to enhance the shock resistance of MEMS gyroscopes. Firstly, the shock transfer functions of the gyroscope and the SPS are derived using Single Degree-of-Freedom and Two Degree-of-Freedom models. The U-folded beam stiffness and maximum positive stress are deduced to evaluate the shock resistance of the silicon beam. Subsequently, the frequency responses of acceleration of the gyroscope and the SPS are simulated and analyzed in Matlab utilizing the theoretical models. Simulation results demonstrate that when the first-order natural frequency of the SPS is approximately one-fourth of the gyroscope’s resonant frequency, the impact protection effect is best, and the SPS does not affect the original performance of the gyroscope. The acceleration peak of the MEMS gyroscope is reduced by approximately 23.5 dB when equipped with the SPS in comparison to its counterpart without the SPS. The anti-shock capability of the gyroscope with the SPS is enhanced by approximately 13 times over the full-temperature range. After the shock tests under the worst case, the gyroscope without the SPS experiences a beam fracture failure, while the performance of the gyroscope with the SPS remains normal, validating the effectiveness of the SPS in improving the shock reliability of MEMS gyroscopes.

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A Transfer Function Approach to Shock Duration Compensation for Laboratory Evaluation of Ultra-High-G Vacuum-Packaged MEMS Accelerometers

Cited by 5 publications

References 11 publications

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Reliability of MEMS in Shock Environments: 2000–2020

Design of a Shock-Protected Structure for MEMS Gyroscopes over a Full Temperature Range

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