Abstract:Wafer manufacfurers usiiallyface critical problems when making decisions regarding to the tool portfolio elimination, mainly due to the dramatic and frequent influences from their internal and external environments. This paper is aimed to develop a mechanism, named Tool Portfolio Elimination Mechanism (TPEM), to evaluate the impacts on production performance and capital expenditure. and to determine which equipment is suitable for pruning. In TPEM, there are four stages to decide tool porlfolio elimination acc… Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.