TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference 2007
DOI: 10.1109/sensor.2007.4300307
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A Three Dimensional Thermal Sensor Based on Single-Walled Carbon Nanotubes

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Cited by 11 publications
(3 citation statements)
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“…For PDEP assembling, CNTs are attracted to regions where the electric field strength is highest, instead, for NDEP assemblies CNTs are attracted to regions where the electric field strength is the lowest. For example, in order to incorporate SWCNTs on 3D electrodes [84] a 10 MHz frequency and PDEP force can be used [85]. By manipulating the parameters described in (3) and (4), such as voltage and frequency, and taking into consideration that the distances between electrodes and dielectric properties are known parameters, the overall position of nanotubes can be estimated.…”
Section: Constructive Solutions For Temperature Sensors Based On Cntsmentioning
confidence: 99%
“…For PDEP assembling, CNTs are attracted to regions where the electric field strength is highest, instead, for NDEP assemblies CNTs are attracted to regions where the electric field strength is the lowest. For example, in order to incorporate SWCNTs on 3D electrodes [84] a 10 MHz frequency and PDEP force can be used [85]. By manipulating the parameters described in (3) and (4), such as voltage and frequency, and taking into consideration that the distances between electrodes and dielectric properties are known parameters, the overall position of nanotubes can be estimated.…”
Section: Constructive Solutions For Temperature Sensors Based On Cntsmentioning
confidence: 99%
“…Selvarasah et al proposed a hybrid fabrication technique for 3-D thermal sensors based on CNTs [15][16]. First, a 2 mask process was utilized to make a microplatform.…”
Section: Thermal Sensorsmentioning
confidence: 99%
“…[15]. For their SWNT-based thermal sensor, the temperature coefficient of resistance ranged from -0.154% to -0.24% for the single electrode device and varied from -0.3 to -0.57% for the multielectrode device [16]. generated local charges, which brought a measurable electrical conductance change in SWNTs.…”
Section: Thermal Sensorsmentioning
confidence: 99%