A Three-Dimensional Integrated Micro Calorimetric Flow Sensor in CMOS MEMS Technology

Xu, Wei; Wang, Bo; Duan, Mingzheng; Ahmed, Moaaz; Bermak, Amine; Lee, Yi-Kuen

doi:10.1109/lsens.2019.2893151

Cited by 24 publications

(9 citation statements)

References 23 publications

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“…Table 2 shows the comparison between our MEMS calorimetric sensor and the other reported CMOS thermal flow sensors. Our MEMS calorimetric sensor gains a prominent normalized sensitivity S of 117 mV/(m/s)/mW with respect to the input heating power, which shows a 21 × higher sensitivity as compared to others work [9,[36][37][38][39][40]. The calorimetric sensor in [41] has a high sensitivity of 103 mV/(m/s)/mW.…”

Section: Resultsmentioning

confidence: 72%

“…The difference between them lies in the designed structure: in hot-wire sensors the wire resistor is free from the substrate, fixed by two prongs and placed within the flow; on the other hand, the wire of hot-film sensors is deposited on a substrate and placed on a surface adjacent to the flow. Hot-wire sensors therefore enable heating uniformity and high sensitivity [8][9][10], but they are fragile and 3D thermal effects occur at the ends of the wire. They have also a low bandwidth because their cutoff frequency is very low.…”

Section: Introductionmentioning

confidence: 99%

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RETRACTED: Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit

2020

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In this paper, a Micro-Electro-Mechanical Systems (MEMS) calorimetric sensor with its measurement electronics is designed, fabricated, and tested. The idea is to apply a configurable voltage to the sensitive resistor and measure the current flowing through the heating resistor using a current mirror controlled by an analog feedback loop. In order to cancel the offset and errors of the amplifier, the constant temperature anemometer (CTA) circuit is periodically calibrated. This technique improves the accuracy of the measurement and allows high sensitivity and high bandwidth frequency. The CTA circuit is implemented in a CMOS FD-SOI 28 nm technology. The supply voltage is 1.2 V while the core area is 0.266 mm2. Experimental results demonstrate the feasibility of the MEMS calorimetric sensor for measuring airflow rate. The developed MEMS calorimetric sensor shows a maximum normalized sensitivity of 117 mV/(m/s)/mW with respect to the input heating power and a wide dynamic flow range of 0–26 m/s. The high sensitivity and wide dynamic range achieved by our MEMS flow sensor enable its deployment as a promising sensing node for direct wall shear stress measurement applications.

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Section: Resultsmentioning

confidence: 72%

Section: Introductionmentioning

confidence: 99%

RETRACTED: Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit

2020

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“…In the combination of bioengineering and integrated circuit technology, the development of accurate current sensing integrated circuits (ICs) is a hot research topic in recent years, especially in the field of biosensing systems, such as ion current detection technology and nanotechnology as shown in Figure 1 (Awan, Wang, Quadir, & Bermak, 2021). This trend of interdisciplinary penetration makes the real-time, sensitive, and robust biosensor system based on CMOS technology more popular (Xu et al, 2019). For instance, the emergence of ICs for DNA sequencing has promoted the research and breakthrough of genetics and has great significance to the prevention of genetic diseases.…”

Section: Introductionmentioning

confidence: 99%

A review and analysis of current-mode biosensing front-end ICs for nanopore-based DNA sequencing

et al. 2022

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Bio-sensors connect the biological world with electronic devices, widely used in biomedical applications. The combination of microelectronic and medical technologies makes biomedical diagnosis more rapid, accurate, and efficient. In this article, the current-mode biosensing front-end integrated circuits (ICs) for nanopore-based DNA sequencing are reviewed and analyzed, aiming to present their operation theories, advantages, limitations, and performances including gain, bandwidth, noise, and power consumption. Because biological information and external interference are contained in extremely weak sensing current, usually at the pA or nA level, it is challenging to accurately detect and restore the desired signals. Based on the requirements of DNA sequencing, this paper shows three circuit topologies of biosensing front-end, namely, discrete-time, continuous-time, and current-to-frequency conversion types. This paper also makes an introduction to the current-mode sensor array for DNA sequencing. To better review and evaluate the research of the state-of-the-art, the most relevant published works are summarized and compared. The review and analysis would help the researchers be familiar with the requirements, constraints, and methods for current-mode biosensing front-end IC designs for nanopore-based DNA sequencing.

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“…Almost every design presents a novel perspective to address certain limitations and/or resolves some of the system-related technological constraints [6]. The main challenge a circuit designer faces is to select a suitable topology based on the design specifications such as bandwidth, input-referred noise, power consumption, dynamic range, and sensitivity [7]. Some Fig.…”

Section: Introductionmentioning

confidence: 99%

Review and Analysis of CMOS Current Readout Circuits for Biosensing Applications

Awan

Wang

Quadir

et al. 2021

2021 IEEE International Symposium on Circuits and Systems (ISCAS)

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CMOS current readout is a critical circuit block for various applications like bio-sensing. This paper presents an overview of CMOS current readout techniques and analyze their merits and demerits, including noise floor, sensitivity, and achievable system bandwidth. Mainly, the practical applicability of individual technique/design for integrated low-noise bio-sensing applications is discussed. To present a thorough insight of the state-of-the-art, most recent and relevant articles published in the literature related to the current sensing interface are summarized and compared. The paper identified the primary DC current rejection schemes, where each approach and its limitations are discussed and shown that each system comes with its limits.

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A Three-Dimensional Integrated Micro Calorimetric Flow Sensor in CMOS MEMS Technology

Cited by 24 publications

References 23 publications

RETRACTED: Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit

RETRACTED: Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit

A review and analysis of current-mode biosensing front-end ICs for nanopore-based DNA sequencing

Review and Analysis of CMOS Current Readout Circuits for Biosensing Applications

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